1991
DOI: 10.1063/1.105606
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Plasma-assisted laser deposition of YBa2Cu3O7−δ

Abstract: The change in superconducting properties due to the presence of a bias electrode in in situ laser deposition was explored. It was found that the bias ring allowed a 50–70 °C reduction in the deposition temperature. This reduction is correlated to an increase in ion current impinging on the substrate.

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Cited by 18 publications
(3 citation statements)
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“…A similar enhancement in the optical excitation of O+ was also obtained in the presence of the ring bias. This supports enhanced ionization of oxygen in the plume, thereby resolving a controversy in previously published work [2,10].…”
Section: Resultssupporting
confidence: 51%
“…A similar enhancement in the optical excitation of O+ was also obtained in the presence of the ring bias. This supports enhanced ionization of oxygen in the plume, thereby resolving a controversy in previously published work [2,10].…”
Section: Resultssupporting
confidence: 51%
“…Films were deposited on silicon substrates with native oxide layers by ablating a composite target of the desired material. 8,9 The substrates were heated to 400°C in a vacuum of 10 −6 Torr. The film thickness was in the range of 300-400 nm.…”
mentioning
confidence: 99%
“…It was noted [8] that the use of the PA-PLD technique for growing thin films from í iO 2 improves their optical properties. The experimental data reported in [8][9][10][11][12][13][14][15][16][17][18] show that the properties of the films prepared by means of the PA-PLD technique depend on the mode of excitation and arrangement of RF discharge plasma in the chamber. In most experiments, film deposition was carried out under the conditions when RF power was supplied to plasma through an electrode placed between the target and the substrate.…”
mentioning
confidence: 99%