“…Ultraviolet (UV) light-emitting diodes (LEDs) [1][2][3], fieldeffect transistors (FETs) [4,5], and UV sensors [6,7] were fabricated by using polar faces of ZnO and ZnO-related films. ZnO and ZnO-related films with the polar faces were grown on several substrates including sapphire (0001) [8], sapphire (1120) [9], SiC [10], CaF 2 [11], MgAl 2 O 4 [12], ScAlMgO 4 (0001) [13], and ZnO (0001) [14].…”