2000
DOI: 10.1063/1.125716
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Plasma-assisted molecular-beam epitaxy of ZnO epilayers on atomically flat MgAl2O4(111) substrates

Abstract: Articles you may be interested inDirect correlation between the internal quantum efficiency and photoluminescence lifetime in undoped ZnO epilayers grown on Zn-polar ZnO substrates by plasma-assisted molecular beam epitaxy ZnO/GaN heterointerfaces and ZnO films grown by plasma-assisted molecular beam epitaxy on (0001) GaN/Al 2 O 3

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Cited by 100 publications
(55 citation statements)
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“…[4] Recently, two of the current authors demonstrated that epitaxial ZnO films could be grown by a low-temperature (≤ 150°C) hydrothermal method. [5] Growth of ZnO films has been widely reported using vapor-phase methods, including molecular beam epitaxy (MBE), [6][7][8] metal organic chemical vapor deposition (MOCVD), [9] and pulsed laser deposition (PLD). [10,11] Applications using epitaxial films generally require a low dislocation density.…”
Section: Introductionmentioning
confidence: 99%
“…[4] Recently, two of the current authors demonstrated that epitaxial ZnO films could be grown by a low-temperature (≤ 150°C) hydrothermal method. [5] Growth of ZnO films has been widely reported using vapor-phase methods, including molecular beam epitaxy (MBE), [6][7][8] metal organic chemical vapor deposition (MOCVD), [9] and pulsed laser deposition (PLD). [10,11] Applications using epitaxial films generally require a low dislocation density.…”
Section: Introductionmentioning
confidence: 99%
“…In order to reduce the lattice strain and dislocation density, a close lattice match between epitaxial ZnO films and substrates is favorable. Sapphire is commonly chosen as the substrates due to its low cost [2,3,7]. However, owing to a large lattice mismatch (18.4% with the 30 • inplane rotation) between ZnO (a = 3.250 Å, c = 5.213 Å) and sapphire (a = 4.754 Å, c = 12.99 Å), as-prepared ZnO films are characteristic of large mosaicity and defect-induced residual carrier concentrations [8].…”
Section: Introductionmentioning
confidence: 99%
“…ZnO, as an oxide semiconductor with a band gap of 3.37 eV at room temperature (RT), is the most promising for the development of efficient ultraviolet devices [3]. In addition, the large exciton binding energy (60 meV at RT) of ZnO, compared with these of GaN (28 meV) and ZnSe (19 meV), is of advantage to stabilize excitonic emission processes and to solve the crucial issues such as large threshold current and short lifetime, which are the most important parameters for optoelectronic devices [4].…”
Section: Introductionmentioning
confidence: 99%
“…Ultraviolet (UV) light-emitting diodes (LEDs) [1][2][3], fieldeffect transistors (FETs) [4,5], and UV sensors [6,7] were fabricated by using polar faces of ZnO and ZnO-related films. ZnO and ZnO-related films with the polar faces were grown on several substrates including sapphire (0001) [8], sapphire (1120) [9], SiC [10], CaF 2 [11], MgAl 2 O 4 [12], ScAlMgO 4 (0001) [13], and ZnO (0001) [14].…”
mentioning
confidence: 99%