Plasma assisted particle contamination control: plasma charging dependence on particle morphology

Huijstee, J.C.A. van; Minderhout, Boy van; Rompelberg, R M H; Blom, P.; Peijnenburg, Ton; Beckers, JL Jozef

doi:10.1117/12.2584607

Cited by 2 publications

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“…For applications, the effects of dust can be detrimental to, e.g. fusion energy reactors [3,26] and plasmas created in semiconductor manufacturing [4,27], which led to recent work focused on contamination control using plasmas [28][29][30]. The charge state of the dust particles in contact with the plasma is often a decisive factor in the dust retention mechanism.…”

Section: Introductionmentioning

confidence: 99%

In-situ measurement of dust charge density in nanodusty plasma

Staps

Donders

Platier

et al. 2021

J. Phys. D: Appl. Phys.

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A dust grain immersed in a low-pressure gas discharge obtains a permanent negative surface charge due to the high mobility of electrons compared to that of ions. This charge essentially governs all fundamental processes in dusty and complex plasmas involving dust grains, neutrals, (an)ions and electrons and—consequently—virtually all industrial applications of these types of plasmas are affected and steered by it. In this work, we have measured the surface charge by application of laser-induced electron detachment from nanosized dust grains in concert with microwave cavity resonance spectroscopy and laser light extinction. The main result is that the electron release is governed by photodetachment rather than by thermionic emission, and that recharging of the dust grains occurs on timescales that are well in agreement with the orbital-motion-limited (OML) theory. The total surface charge density residing on the dust grains inside the laser volume follows from the saturation of the photodetachment signal, which was used in combination with dust density values derived from extinction measurements to estimate the mean dust charge. The negative dust charge on the 140 nm (average) diameter dust grains in this work is obtained to be in the range of 273 – 2519 elementary charges, of which the lower bound matches well with analytical predictions using the OML theory.

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Section: Introductionmentioning

confidence: 99%

In-situ measurement of dust charge density in nanodusty plasma

Staps

Donders

Platier

et al. 2021

J. Phys. D: Appl. Phys.

Self Cite

View full text Add to dashboard Cite

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Physics and applications of dusty plasmas: The Perspectives 2023

Beckers,

Berndt,

Block

et al. 2023

Physics of Plasmas

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Dusty plasmas are electrically quasi-neutral media that, along with electrons, ions, neutral gas, radiation, and electric and/or magnetic fields, also contain solid or liquid particles with sizes ranging from a few nanometers to a few micrometers. These media can be found in many natural environments as well as in various laboratory setups and industrial applications. As a separate branch of plasma physics, the field of dusty plasma physics was born in the beginning of 1990s at the intersection of the interests of the communities investigating astrophysical and technological plasmas. An additional boost to the development of the field was given by the discovery of plasma crystals leading to a series of microgravity experiments of which the purpose was to investigate generic phenomena in condensed matter physics using strongly coupled complex (dusty) plasmas as model systems. Finally, the field has gained an increasing amount of attention due to its inevitable connection to the development of novel applications ranging from the synthesis of functional nanoparticles to nuclear fusion and from particle sensing and diagnostics to nano-contamination control. The purpose of the present perspectives paper is to identify promising new developments and research directions for the field. As such, dusty plasmas are considered in their entire variety: from classical low-pressure noble-gas dusty discharges to atmospheric pressure plasmas with aerosols and from rarefied astrophysical plasmas to dense plasmas in nuclear fusion devices. Both fundamental and application aspects are covered.

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Plasma assisted particle contamination control: plasma charging dependence on particle morphology

Cited by 2 publications

References 0 publications

In-situ measurement of dust charge density in nanodusty plasma

In-situ measurement of dust charge density in nanodusty plasma

Physics and applications of dusty plasmas: The Perspectives 2023

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