Plasma‐Beschichtungsverfahren und Hartstoffschichten 1992. 216 Seiten, 143 Abbildungen, 19 Tabellen, 17 × 24 cm, gebunden DM 98,‐, ISBN 3‐342‐00649‐8

Rother, B.; Gmünd, Schwäbisch; Vetter, J; Gladbach, Bergisch

doi:10.1002/mawe.19930240205

Cited by 2 publications

(3 citation statements)

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“…Therefore, this study will provide process information and a detailed analysis of coating properties for the CAE method. With its higher deposition rates, higher plasma ionization and higher ion energies compared to magnetron sputtering techniques and subsequently typically good adhesion and coating density, the CAE method provides a well-established technology for the industrial application of protective tool coatings [1,2,27]. However, the presence of macroparticles emitted during the evaporation process is a major drawback.…”

Section: Introductionmentioning

confidence: 99%

The Influence of Nitrogen Partial Pressure on the Microstructure and Mechanical Properties of HfNbTaTiVZr High-Entropy Nitride Coating Deposited via Direct Current Cathodic Vacuum Arc Deposition

Krülle,

Kuczyk,

Leonhardt

et al. 2024

Coatings

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In recent years, high-entropy alloys have attracted increasing scientific interest. Due to their promising combination of properties, such as high hardness and high temperature stability, they are attractive for use as tool coatings for machining applications, to give but one example. Previous studies often focused on layer deposition using magnetron sputtering. Comparatively little research has been carried out to date on coating deposition using direct current cathodic vacuum arc deposition (CAE), with higher achievable rates and almost completely ionized plasmas. The aim of this work is to investigate (HfNbTaTiZr)N-coatings produced by CAE. The nitrogen content was varied and the effects on the coating properties were investigated. Changing the N2/(N2 + Ar) ratio between 0.1 and 1.0 and varying the working pressure in the chamber from 2 Pa to 5 Pa resulted in variations of the nitrogen content of the coatings, ranging from 30 at% to 50 at%. Although different microstructures of the coatings were obtained, there was only a minor influence on the hardness and Young’s modulus.

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Section: Introductionmentioning

confidence: 99%

The Influence of Nitrogen Partial Pressure on the Microstructure and Mechanical Properties of HfNbTaTiVZr High-Entropy Nitride Coating Deposited via Direct Current Cathodic Vacuum Arc Deposition

Krülle,

Kuczyk,

Leonhardt

et al. 2024

Coatings

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“…12). ⇒ The lattice defects and distortion at the grain boundaries lead to intrinsic micro stressesgenerally compressive stresses -in PVD coatings [62]. High density of lattice defects results in their rearrangement and formation of particular grain boundaries [31].…”

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confidence: 99%

“…Fig. 12: Lattice cell constant of the fcc TiN lattice cell as a function of the deposition temperature (lattice cell constant of the unstressed TiN a 0 =4.24) [43].⇒ The lattice defects and distortion at the grain boundaries lead to intrinsic micro stressesgenerally compressive stresses -in PVD coatings[62]. High density of lattice defects results in their rearrangement and formation of particular grain boundaries[31].…”

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confidence: 99%

Growth Structures and Phase Formation in Industrially Room-Temperature Pulsed Laser Deposited FCC Ti-Based Nitride Coatings

Lackner

2006

MSF

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The current work focuses on the materials science aspects of the growth phenomena of titanium-based coatings TiN, (Ti,Al)N and (Ti,Al)(C,N) with face-centered cubic lattice structure, deposited by the industrially-styled Pulsed Laser Deposition (PLD) technique at room temperature. hese coating materials are widely spread in mechanical, tribological and decorative applications due to their exceptional physical and chemical properties. Recently, the trend of using temperaturesensitive materials like polymers and tool steels of the highest hardness demands new lowtemperature coating techniques for protective surface finishing as well as for functionalization of the surfaces. These titanium-based compounds can fulfill a wide range of these demands, but up to now there is a lack of industrially designed vacuum coating techniques operating at temperatures lower than 50 °C necessary for these materials. The PLD process is known as one of the most promising candidates for such coating demands. But up to now PLD is only a well-established laboratory coating technology and has not become a standard industrial coating technique despite its outstanding process features. The missing of PLD coating systems, which fulfill the requirements for industrial applications like high-rate deposition and adequate sizes of deposition chambers, is considered as one of the main obstacles for a breakthrough of the PLD technique. To overcome this problem an industrially designed PLD coating system has been developed and built at the Laser Center Leoben of JOANNEUM Research Forschungsgesellschaft mbH.

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Plasma‐Beschichtungsverfahren und Hartstoffschichten 1992. 216 Seiten, 143 Abbildungen, 19 Tabellen, 17 × 24 cm, gebunden DM 98,‐, ISBN 3‐342‐00649‐8

Cited by 2 publications

References 0 publications

The Influence of Nitrogen Partial Pressure on the Microstructure and Mechanical Properties of HfNbTaTiVZr High-Entropy Nitride Coating Deposited via Direct Current Cathodic Vacuum Arc Deposition

The Influence of Nitrogen Partial Pressure on the Microstructure and Mechanical Properties of HfNbTaTiVZr High-Entropy Nitride Coating Deposited via Direct Current Cathodic Vacuum Arc Deposition

Growth Structures and Phase Formation in Industrially Room-Temperature Pulsed Laser Deposited FCC Ti-Based Nitride Coatings

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