Plasma density induced formation of nanocrystals in physical vapor deposited carbon films

Shakerzadeh, Maziar; Teo, Edwin Hang Tong; Sorkin, Anastassia; Bosman, Michel; Tay, Beng Kang; Su, Haibin

doi:10.1016/j.carbon.2010.12.059

Cited by 39 publications

(41 citation statements)

References 26 publications

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“…Further increase in ion energy on the other hand, results in the transfer of excess energy to the neighboring atoms as thermal energy and causes the relaxation of sp 3 sites to lower sp 2 hybridization and hence increases the sp 2 content of the a‐C film through the thermal spikes. Shakerzadeh et al18 show that these thermal spikes can work as the required source of energy for the formation of textured nanocrystals provided that sufficient ion density is used.…”

Section: Formation Mechanisms and Techniquesmentioning

confidence: 99%

“…Figure shows the microstructure of the films deposited using low and high ion density plasma (5 times different) with 300, 400, and 500 V substrate biases respectively 18. Bright field and dark field images, show that the structure is composed of an initial thin amorphous layer followed by a nanocrystalline film.…”

Section: Formation Mechanisms and Techniquesmentioning

confidence: 99%

Section: Formation Mechanisms and Techniquesmentioning

confidence: 99%

“…Recently, nanostructured carbon thin films and in particular nanocrystalline films that consist of preferred oriented nanocrystals17–19 have attracted significant theoretical and experimental attention. By governing the deposition parameters, the crystallization of carbon films can be controlled to achieve different nanostructures with desired preferred orientations ( Figure ).…”

Section: Introductionmentioning

confidence: 99%

“…(B) Plan view HRTEM image of carbon film deposited at room temperature and 500 V substrate bias showing the formation of tubular nanostructures. Reproduced with permission 18. Copyright 2011, Elsevier.…”

Section: Introductionmentioning

confidence: 99%

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Re‐ordering Chaotic Carbon: Origins and Application of Textured Carbon

Shakerzadeh

Loh

et al. 2012

Advanced Materials

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Formation of nanocrystals with preferred orientation within the amorphous carbon matrix has attracted lots of theoretical and experimental attentions recently. Interesting properties of this films, easy fabrication methods and practical problems associated with the growth of other carbon nanomaterials such as carbon nanotubes (CNTs) and graphene gives this new class of carbon nanostructure a potential to be considered as a replacement for some applications such as thermal management at nanoscale and interconnects. In this short review paper, the fabrication techniques and associated formation mechanisms of these nanostructured films have been discussed. Besides, electrical and thermal properties of these nanostructured films have been compared with CNTs and graphene.

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Section: Formation Mechanisms and Techniquesmentioning

confidence: 99%

Section: Formation Mechanisms and Techniquesmentioning

confidence: 99%

Section: Formation Mechanisms and Techniquesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Re‐ordering Chaotic Carbon: Origins and Application of Textured Carbon

Shakerzadeh

Loh

et al. 2012

Advanced Materials

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High Electrochemical Activity Induced by Doping Oxygen in Graphene Sheets Embedded Carbon Film

Cao

Huang

Diao

2020

Adv Materials Inter

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In this work, the high electrochemical activity induced by doping different contents of oxygen on the surface of graphene sheets embedded carbon (GSEC) film is studied, which is prepared by electron cyclotron resonance (ECR) plasma sputtering system under electron irradiation. Transmission electron microscopy observation and Raman analysis confirm that doping oxygen induced more graphene edges and oxygen‐containing functional groups on the surface. The electrochemical activities of the films are measured in the Fe(CN)64–/3– redox system and the results show that a proper doping content of oxygen is beneficial to reduce the oxidation‐reduction peak separation. The surface O‐doped GSEC film with 5% content realizes the simultaneous detection of uric acid (UA), xanthine (XA) and hypoxanthine (HXA) with high sensitivity. The mechanism could be that the isolated electron at graphene edge and the polar fraction of oxygen‐containing functional groups provide more active sites to accelerate the electron transfer. These results indicate that surface O‐doped GSEC films are promising electrode materials to construct sensitive electrochemical biosensors.

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Tribological Thermostability of Carbon Film with Vertically Aligned Graphene Sheets

Chen

Diao

2013

Tribol Lett

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Plasma density induced formation of nanocrystals in physical vapor deposited carbon films

Cited by 39 publications

References 26 publications

Re‐ordering Chaotic Carbon: Origins and Application of Textured Carbon

Re‐ordering Chaotic Carbon: Origins and Application of Textured Carbon

High Electrochemical Activity Induced by Doping Oxygen in Graphene Sheets Embedded Carbon Film

Tribological Thermostability of Carbon Film with Vertically Aligned Graphene Sheets

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