Plasma diagnostics in pulsed laser TiN layer deposition

Abstract

Extraction of negative ions from pulsed electronegative capacitively coupled plasmas J. Appl. Phys. 112, 033303 (2012) High electronegativity multi-dipolar electron cyclotron resonance plasma source for etching by negative ions J. Appl. Phys. 111, 083303 (2012) Decreasing high ion energy during transition in pulsed inductively coupled plasmas Appl. Phys. Lett. 100, 044105 (2012) Characterization and mechanism of He plasma pretreatment of nanoscale polymer masks for improved pattern transfer fidelity Appl. Phys. Lett. 99, 261501 (2011) Origin of electrical signals for plasma etching endpoint detection Time-and space-resolved emission and laser-induced fluorescence spectroscopic measurements were performed to investigate vaporization and plasma formation resulting from excimer laser irradiation of titanium targets in a low-pressure nitrogen atmosphere. Measurement series have been done by varying the laser intensity from the vaporization threshold at 25 MW crne2 up to values of about 500 MW cm-" typically applied in pulsed laser deposition processing of titanium nitride films. Thus, the transition from thermal evaporation to the high-density plasma formation process, leading to the production of reactive species and high-energy ions, was evidenced. An interesting result for the comprehension of the reactive deposition process was the observation of a quantity of dissociated and ionized nitrogen, which is transported with the plasma front in the direction of the substrate. 0 199.5 American Institute of Physics.

Double pulse laser produced plasma on metallic target in seawater: basic aspects and analytical approach

“…The electron number density has been determined by Stark effect [25,27] on the Ti II at 350.49 nm [28] and Na I at 588.99 nm [27] spectral lines. For this estimation, all the other mechanisms contributing to the line broadening have been neglected.…”

Determination of the local electron number density in laser-induced plasmas by Stark-broadened profiles of spectral lines

“…Several works have used one-dimensional spatially-resolved spectroscopy to investigate the spatial gradients of the electron density in the plasma. Measurements resolved along the plasma axis have shown that, at low ambient gas pressures typical of pulsed laser deposition experiments, the electron density shows a monotonic significant decrease as a function of the distance from the target [13,14]. As the ambient gas pressures approaches the atmospheric Spectrochimica Acta Part B 65 (2010) 395-400 pressure, the decrease of the electron density with the axial distance is less pronounced [15].…”

Laser Synthesis of Nanometric Iron Oxide Films with High Seebeck Coefficient and High Thermoelectric Figure of Merit

“…RPLD is a quite simple and fast process, since elemental target and low-pressure gases are used. RPLD allows a good control of thickness and stoichiometry of deposits, simply varying the number of laser pulses (N) and the gas pressure in the reactor [14]. On the other hand, there is great interest to the materials with high ZT, as it is connected with energetic problem.…”