Plasma dispersion effect based super-resolved imaging in silicon

Pinhas, Hadar; Wagner, Omer; Danan, Yossef; Danino, Meir; Zalevsky, Zeev; Sinvani, M.

doi:10.1364/oe.26.025370

Cited by 15 publications

(8 citation statements)

References 41 publications

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“…in a double‐pulse configuration. [ 136 ] This technique consists of a pump beam at 532‐nm wavelength for producing a plasma on the surface for shaping a parallel probe beam at 1.55‐µm wavelength. Two probe beam shapes were obtained using this technique.…”

Section: Self‐limited Excitation With Ultrashort Pulsesmentioning

confidence: 99%

In‐Volume Laser Direct Writing of Silicon—Challenges and Opportunities

Chambonneau

Grojo

Tokel

et al. 2021

Laser & Photonics Reviews

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Laser direct writing is a widely employed technique for 3D, contactless, and fast functionalization of dielectrics. Its success mainly originates from the utilization of ultrashort laser pulses, offering an incomparable degree of control on the produced material modifications. However, challenges remain for devising an equivalent technique in crystalline silicon which is the backbone material of the semiconductor industry. The physical mechanisms inhibiting sufficient energy deposition inside silicon with femtosecond laser pulses are reviewed in this article as well as the strategies established so far for bypassing these limitations. These solutions consisting of employing longer pulses (in the picosecond and nanosecond regime), femtosecond‐pulse trains, and surface‐seeded bulk modifications have allowed addressing numerous applications.

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Section: Self‐limited Excitation With Ultrashort Pulsesmentioning

confidence: 99%

In‐Volume Laser Direct Writing of Silicon—Challenges and Opportunities

Chambonneau

Grojo

Tokel

et al. 2021

Laser & Photonics Reviews

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Section: Silicon Non‐linearity Based Super‐resolved Pump‐probe Imagingmentioning

confidence: 99%

“…To further demonstrate the proposed operation principle we show some experimental results presenting the breaking of the diffraction limit by generating a narrow dip in the center of the probe's beam PSF that can lead also to sub‐wavelength super‐resolved imaging capabilities when performing scanning with the experimentally shaped PSF beam. [ 69 ]…”

Section: Silicon Non‐linearity Based Super‐resolved Pump‐probe Imagingmentioning

confidence: 99%

“…[ 68 ] Topic 18 considers super‐resolution imaging based on material nonlinearity due to plasma dispersion nonlinearity in silicon. [ 69 ] Topic 19 develops a nonlinear Rayleigh scattering microscopy based on plasmonic or dielectric particles with resonant properties (Mie‐resonators) which provide a novel super‐resolution contrast mechanism. [ 70 ] Topic 20 introduces LFSR imaging based on nonlinear photo‐modulated reflectivity (NPMR) which takes place due to the nonlinear changes in the reflectance of materials induced by an ultra‐short pump pulse.…”

Section: Introduction To Roadmapmentioning

confidence: 99%

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Roadmap on Label‐Free Super‐Resolution Imaging

Astratov,

Sahel,

Eldar

et al. 2023

Laser & Photonics Reviews

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Label‐free super‐resolution (LFSR) imaging relies on light‐scattering processes in nanoscale objects without a need for fluorescent (FL) staining required in super‐resolved FL microscopy. The objectives of this Roadmap are to present a comprehensive vision of the developments, the state‐of‐the‐art in this field, and to discuss the resolution boundaries and hurdles that need to be overcome to break the classical diffraction limit of the label‐free imaging. The scope of this Roadmap spans from the advanced interference detection techniques, where the diffraction‐limited lateral resolution is combined with unsurpassed axial and temporal resolution, to techniques with true lateral super‐resolution capability that are based on understanding resolution as an information science problem, on using novel structured illumination, near‐field scanning, and nonlinear optics approaches, and on designing superlenses based on nanoplasmonics, metamaterials, transformation optics, and microsphere‐assisted approaches. To this end, this Roadmap brings under the same umbrella researchers from the physics and biomedical optics communities in which such studies have often been developing separately. The ultimate intent of this paper is to create a vision for the current and future developments of LFSR imaging based on its physical mechanisms and to create a great opening for the series of articles in this field.

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“…12). We envision that the demonstrated photothermal nonlinearity assisted label-free imaging modality could be potentially useful for contactless inspection and metrology of silicon ICs or failure analysis of microelectronic circuitry 52 . It is noted that the proposed technique is also applicable for other shapes and sizes of silicon nanostructures supporting anapole modes, not limited to nanodisks ( Supplementary Fig.…”

Section: Ss Rssmentioning

confidence: 99%

Anapole mediated giant photothermal nonlinearity in nanostructured silicon

et al. 2020

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Featured with a plethora of electric and magnetic Mie resonances, high index dielectric nanostructures offer a versatile platform to concentrate light-matter interactions at the nanoscale. By integrating unique features of far-field scattering control and near-field concentration from radiationless anapole states, here, we demonstrate a giant photothermal nonlinearity in single subwavelength-sized silicon nanodisks. The nanoscale energy concentration and consequent near-field enhancements mediated by the anapole mode yield a reversible nonlinear scattering with a large modulation depth and a broad dynamic range, unveiling a record-high nonlinear index change up to 0.5 at mild incident light intensities on the order of MW/cm 2. The observed photothermal nonlinearity showcases three orders of magnitude enhancement compared with that of unstructured bulk silicon, as well as nearly one order of magnitude higher than that through the radiative electric dipolar mode. Such nonlinear scattering can empower distinctive point spread functions in confocal reflectance imaging, offering the potential for far-field localization of nanostructured Si with an accuracy approaching 40 nm. Our findings shed new light on active silicon photonics based on optical anapoles.

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Plasma dispersion effect based super-resolved imaging in silicon

Cited by 15 publications

References 41 publications

In‐Volume Laser Direct Writing of Silicon—Challenges and Opportunities

In‐Volume Laser Direct Writing of Silicon—Challenges and Opportunities

Roadmap on Label‐Free Super‐Resolution Imaging

Anapole mediated giant photothermal nonlinearity in nanostructured silicon

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