Plasma emission controlled multi-target reactive sputtering for in-situ crystallized Pb(Zr,Ti)O3 thin films on 6″ Si-wafers

Large area deposition of Pb(Zr,Ti)O3 thin films for piezoelectric MEMS devices

“…Moreover, the possibility of Ruddlesden-Popper phase formation in PbTiO 3 was predicted recently by first principle density function theory calculations [12]. In PZT thin films Pb 2 (Zr, Ti)O 4 was observed for the first time in [7]. The lattice constants derived from the XRD pattern were a≈0.39 nm, b≈0.375 nm, and c≈1.3 nm.…”

“…ZrO 2 buffer layers are known to act as lead diffusion barrier [13,14]. Consequently, lead diffusion was confined to the PZT/ZrO 2 interface resulting in a leadenriched amorphous interface layer at 520°C as proofed by GD-OES composition profiling [7].…”

“…For PZT deposition, the oxygen supply to the Pb and Zr targets were fixed at 10 sccm. The admission of oxygen to the Ti target was controlled by PEM via a Ti spectral line (λ=453 nm) intensity [7]. At a substrate temperature of 580°C, the PZT films grew in-situ in the ferroelectric perovskite phase, i.e., no thermal treatment after deposition was needed.…”

“…In order to improve film quality, the ZrO 2 buffer layer was manufactured also by pulsed laser deposition [5]. Recently, we have reported a multi-target reactive sputter deposition of a ZrO 2 barrier layer and a PZT thin film suitable for piezoelectric applications in one process run onto 150 mm oxidized silicon wafers [6,7]. However, little attention has been paid yet to the investigation of the interfaces between the substrate, the ZrO 2 buffer layer and the PZT thin film.…”

Compositional and Optical Gradient in Films of PbZrxTi1-xO3 (PZT) Family

“…The data were compared with bulk polycrystalline material as standard giving quantitative depth profile of the films. Similar method to rf-GD-AES was presented in the work of Vidyarthi et al, 2007, where chemical composition and depth profiling of PZT films was investigated by glow discharge optical emission spectroscopy (GDOES). They used two samples, which chemical composition was measured by RBS, to calibrate GDOES for PZT quantitative compositional analysis.…”