Plasma enhanced chemical vapor deposition (PECVD) of SiOx thin films on Portuguese limestone: An experimental study

Ding, Yufan; Grassini, Sabrina; Angelini, Emma; Schiavon, Nick

doi:10.1016/j.culher.2024.10.001

Journal of Cultural Heritage

2024

DOI: 10.1016/j.culher.2024.10.001

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Plasma enhanced chemical vapor deposition (PECVD) of SiOx thin films on Portuguese limestone: An experimental study

Yufan Ding,

Sabrina Grassini,

Emma Angelini

et al.

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Plasma enhanced chemical vapor deposition (PECVD) of SiOx thin films on Portuguese limestone: An experimental study

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References 52 publications

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