Plasma-enhanced chemical vapor deposition of silicon dioxide

Boogaard, A.

doi:10.3990/1.9789036531306

Cited by 8 publications

(6 citation statements)

References 137 publications

(221 reference statements)

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“…There are two types of discharges commonly used for the generation of thermal plasmas, the electric arc (DC or AC) [ 30] and the high frequency and radio frequency (HF or RF) induction discharge. In the arc discharge, the plasma generating current flows from one electrode to the other through the plasma [31]. The size of the plasma column is determined by the balance of electric power dissipation with heat loss by conduction, radiation and convection.…”

Section: Thermal Plasma Characteristicsmentioning

confidence: 99%

Thermal plasma technology: The prospective future in material processing

Samal

2017

Journal of Cleaner Production

185

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International audienceAn attempt is made to access the past, present and future research and development in thermal plasma processing of materials. A brief explanation from the basic of thermal plasma understanding towards application of technology in various areas is covered in this article. Such as application of thermal plasma in coating technologies, synthesis of fine powders, waste destruction, spherodization with densification of powders and in slag metallurgy are described from the lab scale basis towards the industrial utilization. Since plasma process is governed by a large number of parameters from input power to furnace configuration. Generation of thermal plasma and various types of plasma reactor is discussed for contribute the significance of output attributes. Finally drawbacks for the growth of thermal plasma technology in commercial aspects are covered up. Keeping in view, the future vision in the area of plasma technology is addressed in this article. Thermal plasma technology and its level of achievements in laboratory and industrial benchmark are covered up in this article. A proposal of future vision in thermal plasma technology draws the attention for commercial benefits and reaches in milestone in industrial area

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Section: Thermal Plasma Characteristicsmentioning

confidence: 99%

Thermal plasma technology: The prospective future in material processing

Samal

2017

Journal of Cleaner Production

185

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“…EEDF has a substantial role in plasma modeling due to it need for computation the reaction rates for electron collision reactions [1][2]. There are various possibilities that describing the EEDF, such as Maxwellian, Druyvesteyn, a generalized form between the Maxwell and the Druyvesteyn function, and the solution of the Boltzmann equation [3][4]. The distribution functions assume that elastic collisions are dominated; therefore, the effect of inelastic collisions (ionization or excitation) on the distribution function is insignificant [5].…”

Section: Introductionmentioning

confidence: 99%

NUMERICAL CALCULATIONS OF THE ELECTRON ENERGY DISTRIBUTION FUNCTION IN (50% SF6 - 50 % Xe) MIXTURE WITH CORRESPONDING TRANSPORT PARAMETERS

Hady

2019

Int. J. Res. Granthaalayah

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We used EEDF software package program to solve Boltzmann equation to calculate the electron energy distribution function in (50% SF6 – 50% Xe) mixture. The calculations are achieved under a steady state electric field using the classical two - term approximation. The electron energy distribution function (EEDF) and the corresponding transport coefficients (mean electron energy, characteristic energy, mobility of electron, diffusion coefficient, and drift velocity) for constant and various electron concentrations are calculated and graphically represented. It is found that variations of electron concentration have a significant effect on transport coefficients of the mixture. The work is in a well agreement with previously experimental and computational researches.

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“…The EEDF assumes that elastic collisions are dominating; therefore the effect of inelastic collisions (ionization or excitation) on the distribution function is insignificant [3]. To describe the EEDF several functions are mentioned such as Maxwellian, Druyvesteyn, generalized Maxwellian -Druyvesteyn, and solution of Boltzmann equation [4,5]. There are many computational resources and numerical techniques used to find the transport properties [6].…”

Section: Introductionmentioning

confidence: 99%

Studying the Electron Energy Distribution Function (EEDF) and Electron Transport Coefficients in SF6 – He Gas Mixtures by Solving the Boltzmann Equation

Journal¹

2017

Baghdad Sci.J

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The Boltzmann equation has been solved using (EEDF) package for a pure sulfur hexafluoride (SF6) gas and its mixtures with buffer Helium (He) gas to study the electron energy distribution function EEDF and then the corresponding transport coefficients for various ratios of SF6 and the mixtures. The calculations are graphically represented and discussed for the sake of comparison between the various mixtures. It is found that the various SF6 – He content mixtures have a considerable effect on EEDF and the transport coefficients of the mixtures

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Plasma-enhanced chemical vapor deposition of silicon dioxide

Abstract: Plasma-enhanced chemical vapor deposition of silicon dioxide: optimizing dielectric films through plasma characterization Author: Arjen Boogaard

Cited by 8 publications

References 137 publications

Thermal plasma technology: The prospective future in material processing

Thermal plasma technology: The prospective future in material processing

NUMERICAL CALCULATIONS OF THE ELECTRON ENERGY DISTRIBUTION FUNCTION IN (50% SF6 - 50 % Xe) MIXTURE WITH CORRESPONDING TRANSPORT PARAMETERS

Studying the Electron Energy Distribution Function (EEDF) and Electron Transport Coefficients in SF6 – He Gas Mixtures by Solving the Boltzmann Equation

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