Handbook of Semiconductor Manufacturing Technology, Second Edition 2007
DOI: 10.1201/9781420017663.ch21
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Plasma Etch

Peter L. G. Ventzek1,
Shahid Rauf2,
T. Sparks3
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Cited by 3 publications
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References 134 publications
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Integrated Substrates: Millimeter-Wave Transistor Technologies

Božanić
1
,
Sinha
2
2019
Smart Sensors, Measurement and Instrumentation
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Integrated Substrates: Millimeter-Wave Transistor Technologies

Božanić
1
,
Sinha
2
2019
Smart Sensors, Measurement and Instrumentation
0
0
0
0
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Advanced Low-Noise Amplifier Optimization Topics

Božanić
1
,
Sinha
2
2017
Signals and Communication Technology
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0
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Formation of a SiOF reaction intermixing layer on SiO2 etching using C4F6/O2/Ar plasmas

Ohya
1
,
Tomura
2
,
Ishikawa
3
et al. 2016
Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films
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