Cubic-and rectangular-shape single crystals of a-AlF 3 in sizes of 5 -50 mm have been synthesized by a solid -vapor phase process. Using the electron beam induced decomposition of AlF 3 , a method is demonstrated for fabricating patterned aluminum nanowires in AlF 3 substrate in a scanning electron microscope. By controlling the accelerating voltage, the beam current and scanning time, it is possible to fabricate metallic nanowires of different sizes. The aluminum nanowires may act as nanointerconnects for nanoelectronics. This work demonstrates a potential technique for e-beam nanofabrication. q