“…Recently, carbons at the nanoscale attract great interest for a huge number of applications, such as transistor, field emission display, actuator, molecular wires/interconnect, transparent conducting film, supercapacitor, and catalyst [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 ]. Especially hydrogenated amorphous carbon (a-C:H) layers are widely used as a hard mask in semiconductor-device fabrication processes.…”