Plasma-immersion ion implantation for diffusive treatment

Möller, W.; Parascandola, S.; Kruse, Olaf; Günzel, R.; Richter, E.

doi:10.1016/s0257-8972(99)00144-9

Cited by 69 publications

(22 citation statements)

References 32 publications

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“…Möller and coworkers [122] describe PBII of nitrogen as "favorable boundary conditions for the efficiency of diffusive surface treatment." The kinetic energy of ions is only needed to penetrate the surface layer of contamination or similar barrier, while the actual nitriding step is dominated by diffusion.…”

Section: A Reduction Of Wear and Corrosion Applications In Metallurgymentioning

confidence: 99%

Plasma-based ion implantation and deposition: a review of physics, technology, and applications

Pelletier

Anders

2005

IEEE Trans. Plasma Sci.

174

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After pioneering work in the 1980s, plasma-based ion implantation (PBII) and plasma-based ion implantation and deposition (PBIID) can now be considered mature technologies for surface modification and thin film deposition. This review starts by looking at the historical development and recalling the basic ideas of PBII. Advantages and disadvantages are compared to conventional ion beam implantation and physical vapor deposition for PBII and PBIID, respectively, followed by a summary of the physics of sheath dynamics, plasma and pulse specifications, plasma diagnostics, and process modelling. The review moves on to technology considerations for plasma sources and process reactors. PBII surface modification and PBIID coatings are applied in a wide range of situations. They include the by-now traditional tribological applications of reducing wear and corrosion through the formation of hard, tough, smooth, low-friction and chemically inert phases and coatings, e.g. for engine components. PBII has become viable for the formation of shallow junctions and other applications in microelectronics. More recently, the rapidly growing field of biomaterial synthesis makes used 1 of PBII&D to produce surgical implants, bio-and blood-compatible surfaces and coatings, etc.With limitations, also non-conducting materials such as plastic sheets can be treated. The major interest in PBII processing originates from its flexibility in ion energy (from a few eV up to about 100 keV), and the capability to efficiently treat, or deposit on, large areas, and (within limits) to process non-flat, three-dimensional workpieces, including forming and modifying metastable phases and nanostructures.We use the acronym PBII&D when referring to both implantation and deposition, while PBIID implies that deposition is part of the process.2

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Section: A Reduction Of Wear and Corrosion Applications In Metallurgymentioning

confidence: 99%

Plasma-based ion implantation and deposition: a review of physics, technology, and applications

Pelletier

Anders

2005

IEEE Trans. Plasma Sci.

174

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“…The texture can be also changed by ion irradiation [6]. Another efficient diffusive surface treatment is plasma nitriding [7], and changes of texture after nitriding polycrystalline austenitic stainless steels (ASS) have been already reported [8,9]. Moreover, for this class of material, lattice rotation of a few degrees have been pointed out by Abrasonis et al [10] in nitrided 316L single crystals, thus suggesting that this type of treatment could be used to modify and potentially control the crystallographic texture of ASS.…”

Section: Introductionmentioning

confidence: 99%

Lattice rotation induced by plasma nitriding in a 316L polycrystalline stainless steel

et al. 2010

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“…In order to obtain the full ion energy at the target surface, the pressure must be kept sufficiently low (below 0.5 Pa). The high voltage has to be applied in 10 s duration with repetition frequencies ranging from 10 Hz to 1 kHz to avoid excessive power loads into the target [5]. * Tel.…”

Section: Introductionmentioning

confidence: 99%

Characterization of surface mechanical properties of H13 steel implanted by plasma immersion ion implantation

Saklakoğlu

2007

Journal of Materials Processing Technology

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Plasma-immersion ion implantation for diffusive treatment

Cited by 69 publications

References 32 publications

Plasma-based ion implantation and deposition: a review of physics, technology, and applications

Plasma-based ion implantation and deposition: a review of physics, technology, and applications

Lattice rotation induced by plasma nitriding in a 316L polycrystalline stainless steel

Characterization of surface mechanical properties of H13 steel implanted by plasma immersion ion implantation

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