Plasma Ion Source with an Internal Evaporator

Abstract

A new construction of a hollow cathode ion source equipped with an internal evaporator heated by a spiral cathode filament and arc discharge is presented. The source is especially suitable for production of ions from solids. The proximity of arc discharge region and extraction opening enables production of intense ion beams even for very low discharge current (I a = 1.2 A). The currents of 50 µA (Al + ) and 70 µA (Bi + ) were obtained using the extraction voltage of 25 kV. The source is able to work for several tens of hours without maintenance breaks, giving possibility of high dose implantations. The paper presents the detailed description of the ion source as well as its experimental characteristics like dependences of extracted currents and anode voltage on anode and cathode currents.

Production of Doubly Charged Ions Using a Hollow Cathode Ion Source with an Evaporator

“…In the paper we describe the production of beams of doubly charged ions of gaseous, metallic and non-metallic elements using an arc discharge ion source with a hollow cathode and the internal evaporator [14,15]. The ion source is a next step in development of a Nielsen [16] type based arc discharge ion source with a cylindrical anode [17,18] which became a basic ion source in the Institute of Physics in Lublin, oering possibility of implantations with a variety of ions, including ions of rare earths.…”