Plasma-Less Photoresist Stripping

Takahashi, Hiroaki

doi:10.1149/ma2007-02/18/1031

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“…Furthermore, the c-axis films were grown only by pulsed laser deposition (PLD). [5][6][7] By sputtering, on the other hand, only a-axis films were grown. 8) In this paper, we describe the growth and properties of caxis thin films for the bilayer manganate LSMO327 by onaxis rf-magnetron sputtering.…”

Section: Introductionmentioning

confidence: 99%

Growth and Properties of c-Axis Epitaxial Thin Films for La_2-2xSr_1+2xMn₂O₇ Bilayer Manganates by Sputtering

Lmouchter¹,

Iwayama²,

Tanaka³

et al. 2005

Jpn. J. Appl. Phys.

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c-Axis epitaxial thin films of a layered manganate La 2À2x Sr 1þ2x Mn 2 O 7 have been grown on SrTiO 3 (100) substrates by on-axis rf-magnetron sputtering. The films have been characterized using energy dispersive spectroscopy (EDS), X-ray diffraction (XRD), high resolution scanning electron microscopy (HRSEM), magnetoresistivity, and magnetization measurements. It is shown that the film chemical composition is sensitive to the deposition parameters, and that a small deviation of composition or deposition condition causes nucleation of the (La,Sr)MnO 3 structure. It is found that the deposition rate is crucial for the c-axis film growth; stoichiometric c-axis La 2À2x Sr 1þ2x Mn 2 O 7 films have been grown under limited conditions of a low rate of 0.8 nm/min, an (Ar, O 2 50%) atmospheric pressure of 120 mTorr, and a substrate temperature of 760 C. From X-ray diffraction simulation, it is inferred that the c-axis La 2À2x Sr 1þ2x Mn 2 O 7 films thus grown contain intergrowths comprised of (La,Sr)MnO 3 and presumably (La,Sr) 2 MnO 4 structures, and the total intergrowth fraction amounts to about 40%.

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Section: Introductionmentioning

confidence: 99%

Growth and Properties of c-Axis Epitaxial Thin Films for La_2-2xSr_1+2xMn₂O₇ Bilayer Manganates by Sputtering

Lmouchter¹,

Iwayama²,

Tanaka³

et al. 2005

Jpn. J. Appl. Phys.

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Plasma-Less Photoresist Stripping

Abstract: not Available.

Cited by 1 publication

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Growth and Properties of c-Axis Epitaxial Thin Films for La_2-2xSr_1+2xMn₂O₇ Bilayer Manganates by Sputtering

Growth and Properties of c-Axis Epitaxial Thin Films for La_2-2xSr_1+2xMn₂O₇ Bilayer Manganates by Sputtering

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Plasma-Less Photoresist Stripping

Abstract: not Available.

Cited by 1 publication

References 1 publication

Growth and Properties of c-Axis Epitaxial Thin Films for La2-2xSr1+2xMn2O7 Bilayer Manganates by Sputtering

Growth and Properties of c-Axis Epitaxial Thin Films for La2-2xSr1+2xMn2O7 Bilayer Manganates by Sputtering

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Growth and Properties of c-Axis Epitaxial Thin Films for La_2-2xSr_1+2xMn₂O₇ Bilayer Manganates by Sputtering

Growth and Properties of c-Axis Epitaxial Thin Films for La_2-2xSr_1+2xMn₂O₇ Bilayer Manganates by Sputtering