2011
DOI: 10.1063/1.3611416
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Plasma-oxidation of Ge(100) surfaces using dielectric barrier discharge investigated by metastable induced electron spectroscopy, ultraviolet photoelectron spectroscopy, and x-ray photoelectron spectroscopy

Abstract: The radical oxidation of Ge(100) applying a dielectric barrier discharge plasma was investigated using metastable induced electron spectroscopy, ultraviolet photoelectron spectroscopy, and x-ray photoelectron spectroscopy. The plasma treatments were performed in a pure oxygen atmosphere as well as under environmental conditions at room temperature. In both atmospheres GeO2 layers up to thicknesses of several nm were formed on the Ge(100) surface.

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Cited by 15 publications
(12 citation statements)
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“…A comparable effect of oxygen enrichment was shown in the work of L. Wegewitz et al. after plasma‐induced oxidation of germanium and by L. Klarhöfer et al. after plasma treatment of lignin and cellulose .…”
Section: Discussionsupporting
confidence: 77%
See 1 more Smart Citation
“…A comparable effect of oxygen enrichment was shown in the work of L. Wegewitz et al. after plasma‐induced oxidation of germanium and by L. Klarhöfer et al. after plasma treatment of lignin and cellulose .…”
Section: Discussionsupporting
confidence: 77%
“…An integration of nitrogen from outside due to plasma discharge can be excluded as referenced by L. Wegewitz et al. .…”
Section: Discussionmentioning
confidence: 99%
“…The plasma source is mounted to the preparation chamber mentioned above and has been described elsewhere. 40 An alternating high voltage pulse generator with a pulse duration of t p ¼ 0.6 ls and a pulse repetition rate of 10 kHz is connected to the dielectric isolated electrode, while the sample forms the grounded counter electrode. The discharge gap is set to about d ¼ 1 mm.…”
Section: Methodsmentioning
confidence: 99%
“…Shift in peak positions is generally toward higher BE when the oxidation state of the element increases and the BE increases linearly with an increase in the number of nearest oxygen atoms around Ge . Previous assignments of germanium oxidation states have been proposed by Asahi et al for a sodium germanosilicate glass, in which an energy difference of ~3.1 eV was observed between the Ge 0 and Ge 4+ oxidation states …”
Section: Resultsmentioning
confidence: 99%
“…82 Previous assignments of germanium oxidation states have been proposed by Asahi et al 76 for a sodium germanosilicate glass, in which an energy difference of~3.1 eV was observed between the Ge 0 and Ge 4+ oxidation states. 83 On other hand, a shift toward lower BE of Ge 3d has been found for sodium iron germanate glasses, in which Ge coordination changes from quartz-like GeO 2 (fourfold coordinated Ge) to rutile-like GeO 2 (sixfold coordinated Ge) state. 74 However, the former case, in which the BE shifts toward higher values with increasing coordination number, seems more plausible, given that an octahedral configuration entails more and longer Ge-BOs bonds compared to GeO 4 tetrahedra, 51 with higher bond ionicity, 84 and thus higher BE for sixfold compared to fourfold coordinated germanium.…”
mentioning
confidence: 99%