Plasma shielding effect in laser ablation of metallic samples and its influence on LIBS analysis

Aguilera, J.A.; Aragón, C.; Peñalba, F.

doi:10.1016/s0169-4332(97)00648-x

Cited by 123 publications

(76 citation statements)

References 10 publications

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“…5(a) that, generally, signal intensity increases with increasing laser energy for both neutral Si lines, and deviates from the linearity at high energies (N0.5 mJ/pulse), which could be attributed to laser beam absorption by the plasma above the target surface (plasma shielding) [17]. However, at energies between 56 and 800 µJ/pulse, 2 different regions were observed.…”

Section: Laser Pulse Energy Dependence Of Signal Intensity and Ablatimentioning

confidence: 95%

2-D analysis of Ge implanted SiO2 surfaces by laser-induced breakdown spectroscopy

Yalçın

Örer

Turan

2008

Spectrochimica Acta Part B: Atomic Spectroscopy

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Laser-induced breakdown spectroscopy 2-D elemental distribution of Ge in silicon oxide substrates with differing implantation doses of between 3 ×1016 cm − 2 and 1.5 × 10 17 cm − 2 has been investigated by Laser-Induced Breakdown Spectroscopy (LIBS).Spectral emission intensity has been optimized with respect to time, crater size, ablation depth and laser energy. Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM) coupled with EnergyDispersive X-Ray Spectroscopy (EDX) have been utilized to obtain crater depth, morphology and elemental composition of the sample material, respectively. LIBS spectral data revealed the possibility of performing 2-D distribution analysis of Ge atoms in silicon oxide substrate. EDX analysis results confirmed that LIBS is capable to detect Ge atoms at concentrations lower than 0.2% (atomic). LIBS as a fast semi-quantitative analysis method with 50 µm lateral and 800 nm depth resolution has been evaluated. Results illustrate the potential use of LIBS for rapid, on-line assessment of the quality of advanced technology materials during the manufacturing process.

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Section: Laser Pulse Energy Dependence Of Signal Intensity and Ablatimentioning

confidence: 95%

2-D analysis of Ge implanted SiO2 surfaces by laser-induced breakdown spectroscopy

Yalçın

Örer

Turan

2008

Spectrochimica Acta Part B: Atomic Spectroscopy

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“…Between 10 −9 s and 10 −8 s, plasma becomes opaque for laser radiation, thus the last part of the laser pulse interacts with plasma surface and will be absorbed or reflected, hence it will not ionize much more material. This effect is called plasma shielding and is strongly dependent on environmental conditions (surrounding gases or vacuum) and experimental conditions (laser irradiance and wavelength) [12,13]. This shielding reduces the ablation rate because the radiation does not reach the sample surface.…”

Section: Laser Ablation and Plasma Physics Of Libsmentioning

confidence: 99%

“…This shielding reduces the ablation rate because the radiation does not reach the sample surface. This induces a crater with melted and deposited material around it but at the same time the plasma is reheated and the lifetime and size of plasma is higher [13,14].…”

Section: Laser Ablation and Plasma Physics Of Libsmentioning

confidence: 99%

Laser-Induced Breakdown Spectroscopy: Fundamentals, Applications, and Challenges

2012

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Laser-induced breakdown spectroscopy (LIBS) is a technique that provides an accurate in situ quantitative chemical analysis and, thanks to the developments in new spectral processing algorithms in the last decade, has achieved a promising performance as a quantitative chemical analyzer at the atomic level. These possibilities along with the fact that little or no sample preparation is necessary have expanded the application fields of LIBS. In this paper, we review the state of the art of this technique, its fundamentals, algorithms for quantitative analysis or sample classification, future challenges, and new application fields where LIBS can solve real problems.

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“…[11][12][13][14] Many groups around the globe are working on LIBS quantitative elemental analysis using calibration curve method. [15][16][17][18][19][20] For this, generally, a calibration curve prepared by using the emission line intensity of the analyte material versus its concentration is used. The curves are constructed using known standard elemental concentrations in a matrix matching the sample.…”

Section: Introductionmentioning

confidence: 99%

“…Mao et al, 16 Aguilera et al 17 and Aragon et al 18 reported that the experimental conditions which can affect the analytical performance need to be optimized carefully for meaningful quantitative results from the linear calibration curve. Based on the purpose for which LIBS is to be used, one needs to make a judicious choice of the spectrograph, detectors and collection/excitation optics.…”

Section: Introductionmentioning

confidence: 99%

Homogeneity testing and quantitative analysis of manganese (Mn) in vitrified Mn-doped glasses by laser-induced breakdown spectroscopy (LIBS)

et al. 2014

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Laser-induced breakdown spectroscopy (LIBS), an atomic emission spectroscopy method, has rapidly grown as one of the best elemental analysis techniques over the past two decades. Homogeneity testing and quantitative analysis of manganese (Mn) in manganese-doped glasses have been carried out using an optimized LIBS system employing a nanosecond ultraviolet Nd:YAG laser as the source of excitation. The glass samples have been prepared using conventional vitrification methods. The laser pulse irradiance on the surface of the glass samples placed in air at atmospheric pressure was about 1.7×109 W/cm2. The spatially integrated plasma emission was collected and imaged on to the spectrograph slit using an optical-fiber-based collection system. Homogeneity was checked by recording LIBS spectra from different sites on the sample surface and analyzing the elemental emission intensities for concentration determination. Validation of the observed LIBS results was done by comparison with scanning electron microscope- energy dispersive X-ray spectroscopy (SEM-EDX) surface elemental mapping. The analytical performance of the LIBS system has been evaluated through the correlation of the LIBS determined concentrations of Mn with its certified values. The results are found to be in very good agreement with the certified concentrations.

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Plasma shielding effect in laser ablation of metallic samples and its influence on LIBS analysis

Cited by 123 publications

References 10 publications

2-D analysis of Ge implanted SiO2 surfaces by laser-induced breakdown spectroscopy

2-D analysis of Ge implanted SiO2 surfaces by laser-induced breakdown spectroscopy

Laser-Induced Breakdown Spectroscopy: Fundamentals, Applications, and Challenges

Homogeneity testing and quantitative analysis of manganese (Mn) in vitrified Mn-doped glasses by laser-induced breakdown spectroscopy (LIBS)

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