2020
DOI: 10.1109/tps.2019.2958972
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Plasma Simulation Benchmark for CCRF Discharge With Secondary Electron Emission

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Cited by 5 publications
(3 citation statements)
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“…Likewise, the code can be verified by comparing the results with different model simulations or codes to provide some indication of applicability to different models [23][24][25][26]. In addition, many studies have given benchmark cases based on numerical simulations or analytical solutions [27][28][29] in order to help fill the void of benchmark and validation problems to develop new PIC codes.…”
Section: Implications Of Particle Balance In Steady Statementioning
confidence: 99%
“…Likewise, the code can be verified by comparing the results with different model simulations or codes to provide some indication of applicability to different models [23][24][25][26]. In addition, many studies have given benchmark cases based on numerical simulations or analytical solutions [27][28][29] in order to help fill the void of benchmark and validation problems to develop new PIC codes.…”
Section: Implications Of Particle Balance In Steady Statementioning
confidence: 99%
“…In practice, measurements and practical observations related to analyzing the nature of PD are very difficult and sometimes impossible, because when this phenomenon occurs, it is not possible to access the insulation cavity. Using the electric field equations in the zero-dimensional space, it is possible to study the voltage and current signals caused by an electrical discharge [6], But other parameters such as voltage frequency, gas temperature, and pressure were not included in these calculations [7], So researchers started using plasma equations to have a better study on electrical breakdowns behavior in that even the Secondary Electron Emission equations from the cathode surface could also be considered and thus, the energy of electrons can be obtained with better accuracy [8].…”
Section: Introductionmentioning
confidence: 99%
“…In order to study such devices, numerical simulation based on fully kinetic [26][27][28][29][30][31][32][33][34][35][36][37][38][39], hybrid [40], and fluid [41][42][43][44][45][46][47][48][49] models were all successfully used in the literature. Compared to the more physically accurate kinetic models, fluid models offer less demanding computation and hence more attractive for practical applications where more complex boundary conditions are provided.…”
Section: Introductionmentioning
confidence: 99%