Plasma-treated polymer as humidity sensing material—a feasibility study

Synthesis and Humidity Sensing Investigations of Nanostructured ZnSnO<sub>3</sub>

“…Generally a humidity sensor has to possess fast response, high sensitivity, negligible hysteresis over periods of usage and possibly a large operating range for both humidity and temperature. The importance of humidity sensing has been well understood and many researchers have been focussed on the development of humidity sensitive materials [12][13][14][15][16]. Most humidity detection studies have investigated on the use of polymer [17][18][19][20][21][22] and ceramic materials due to their low cost and excellent performance [23][24][25][26][27].…”

Capacitive humidity and dew-point sensing: Influence of wetting of surface-attached polymer monolayers on the sensor response

“…However, the system they used is rather complex and therefore it is difficult to judge to what extend the sensor performance was improved by varying the surface wettability. Another observation on surface wetting impact on relative humidity sensing was reported by Dabhabe et al [14]. The authors achieved better sensitivities at lower RH ranges by making a PMMA coating hydrophilic using an Argon plasma-treatment.…”

A Simple Capacitive Sensor Array Based on a Metal-Insulator-Metal Structure

“…Capacitive detection method is a widely used technique to measure relative humidity(RH) [1][2][3][4][5][6][7][8]. Generally, capacitive humidity sensors are comprised of a pair of electrodes and a humidity-sensitive insulating layer, made from materials such as polymer [9][10][11][12], metal oxide [13,14], and semiconductors [15,16]. The large dielectric constant of water, compared to those of many insulators, causes a detectable change in capacitance upon water absorption by the insulator.…”