Plasmaborieren - Untersuchungen zum Einfluß der Glimmentladung beim Borieren in einer BCl3-H2-Ar-Atmosphäre

Cabeo, E. Rodrı́guez; Rie, K.‐T.

doi:10.1002/(sici)1521-4052(200005)31:5<345::aid-mawe345>3.0.co;2-w

Cited by 2 publications

(1 citation statement)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Since the use of dry solid precursors containing boron has several disadvantages, processes using gaseous precursors are of growing interest. Several investigations on gas and plasma boriding using mixtures of BCl 3 with Ar and H 2 have reported varying success [3][4][5]. In particular, the use of heated-wall pulsed glow discharges showed promising results of the plasma-assisted boriding.…”

Section: Introductionmentioning

confidence: 99%

Plasma process monitoring of BCl₃using high-resolution infrared laser absorption spectroscopy

Hempel

Lang

Zimmermann

et al. 2010

Meas. Sci. Technol.

View full text Add to dashboard Cite

Boron trichloride (BCl 3 ) is used as a source gas in various industrial plasma applications. The online monitoring of its ground state concentration in the plasma process reactor is vital for improved insight into the plasma chemistry and to increase productivity, reliability and reproducibility of the process. Infrared absorption spectroscopy was applied for in situ measurements of absolute densities of BCl 3 and HCl in planar microwave plasma sources as well as in an industrial pulsed dc discharge reactor. In this paper procedures for the determination of HITRAN format line strength data files for BCl 3 are described together with results of concentration measurements. The results show the influence of the discharge parameters on the dissociation of BCl 3 and its conversion to HCl. Observations using tuneable diode lasers are compared with measurements using quantum cascade lasers and the applicability of this diagnostic technique for industrial plasma process monitoring is shown.

show abstract

Section: Introductionmentioning

confidence: 99%

Plasma process monitoring of BCl₃using high-resolution infrared laser absorption spectroscopy

Hempel

Lang

Zimmermann

et al. 2010

Meas. Sci. Technol.

View full text Add to dashboard Cite

show abstract

Table of Appendices

Linke¹,

Börner²,

Heß³

2016

Cylindrical Gears

View full text Add to dashboard Cite

Plasmaborieren - Untersuchungen zum Einfluß der Glimmentladung beim Borieren in einer BCl3-H2-Ar-Atmosphäre

Cited by 2 publications

References 3 publications

Plasma process monitoring of BCl₃using high-resolution infrared laser absorption spectroscopy

Plasma process monitoring of BCl₃using high-resolution infrared laser absorption spectroscopy

Table of Appendices

Contact Info

Product

Resources

About

Plasmaborieren - Untersuchungen zum Einfluß der Glimmentladung beim Borieren in einer BCl3-H2-Ar-Atmosphäre

Cited by 2 publications

References 3 publications

Plasma process monitoring of BCl3using high-resolution infrared laser absorption spectroscopy

Plasma process monitoring of BCl3using high-resolution infrared laser absorption spectroscopy

Table of Appendices

Contact Info

Product

Resources

About

Plasma process monitoring of BCl₃using high-resolution infrared laser absorption spectroscopy

Plasma process monitoring of BCl₃using high-resolution infrared laser absorption spectroscopy