“…Here, we report a novel process of plasmon generation in TCOs over a wide spectral range of 1.87–10.48 eV, deploying dual-ion beam sputtering (DIBS) system. By exploiting the DIBS system, the formation of the plasmonic nanoclusters has been elucidated in our earlier publications. − In continuation to our earlier studies on sputter-instigated plasmon generations, further extending our work on metal and metal oxide cluster formations and their effects on plasmon generations, additional studies are performed as follows: (1) effect of growth temperature on the electrical and structural properties of the TCO thin films grown by utilizing a secondary source; (2) influence of material properties on metal and metal oxide nanoclusters formation; (3) impact of physical parameters, i.e., size, surface coverage, interparticle distance, etc., of nanoclusters on the tuning of plasmonic properties; (4) quantification of the plasmon energies within broad plasmonic peaks; (5) finding the possibility of a particular type of plasmon, i.e., particle plasmon (in the air, or within material), surface plasmon, and bulk plasmon generation at air/thin film interface, and within a thin film.…”