2009
DOI: 10.1143/jjap.48.04c064
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Plastic Deformation and Failure Analysis of Phase Change Random Access Memory

Abstract: Although lateral phase change random access memory (PCRAM) has attracted a lot of interest due to its simpler fabrication process and lower current compared to ovonic unified memory (OUM), it faces a problem of poor lifetime. This paper studied relation between plastic deformation and the failure of PCRAM through both experiment and simulation. OUM and lateral PCRAM incorporating Ge 2 Sb 2 Te 5 were fabricated and tested. The overwriting test showed that lifetime of OUM exceeded 10 6 while that of lateral PCRA… Show more

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Cited by 3 publications
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“…The simulation model and parameters are same as the previously reported. 13,14) In this simulation, it is assumed that the melting temperature T m of Ge 2 Sb 2 Te 5 is 600 C and initial state is fully crystalline state. RESET process is simulated with different pulse width and pulse amplitude.…”
Section: Simulation Results and Discussionmentioning
confidence: 99%
“…The simulation model and parameters are same as the previously reported. 13,14) In this simulation, it is assumed that the melting temperature T m of Ge 2 Sb 2 Te 5 is 600 C and initial state is fully crystalline state. RESET process is simulated with different pulse width and pulse amplitude.…”
Section: Simulation Results and Discussionmentioning
confidence: 99%