Plastic-scale-model assembly of ultrathin film MEMS piezoresistive strain sensor with conventional vacuum-suction chip mounter

Takamatsu, Seiichi; Goto, Shintaro; Yamamoto, Masahide; Yamashita, Takahiro; Kobayashi, Takeshi; Itoh, Toshihiro

doi:10.1038/s41598-019-39364-2

Cited by 16 publications

(7 citation statements)

References 12 publications

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“…S1 ; Supplementary Methods ). 20 , 21 Groups of 7-dpf larvae of a single genotype (between 50 and 58 larvae in each group) were contained in a six-lane arena with a transparent base (one group per lane) ( Supplementary Fig. S1 b).…”

Section: Methodsmentioning

confidence: 99%

Altered Visual Function in a Larval Zebrafish Knockout of Neurodevelopmental Risk Gene pdzk1

Xie

Jusuf

Bui

et al. 2021

Invest. Ophthalmol. Vis. Sci.

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Purpose The human PDZK1 gene is located in a genomic susceptibility region for neurodevelopmental disorders. A genome-wide association study identified links between PDZK1 polymorphisms and altered visual contrast sensitivity, an endophenotype for schizophrenia and autism spectrum disorder. The PDZK1 protein is implicated in neurological functioning, interacting with synaptic molecules including postsynaptic density 95 (PSD-95), N -methyl- d -aspartate receptors (NMDARs), corticotropin-releasing factor receptor 1 (CRFR1), and serotonin 2A receptors. The purpose of the present study was to elucidate the role of PDZK1. Methods We generated pdzk1- knockout ( pdzk1- KO) zebrafish using CRISPR/Cas-9 genome editing. Visual function of 7-day-old fish was assessed at behavioral and functional levels using the optomotor response and scotopic electroretinogram (ERG). We also quantified retinal morphology and densities of PSD-95, NMDAR1, CRFR1, and serotonin in the synaptic inner plexiform layer at 7 days, 4 weeks, and 8 weeks of age. Standard RT-PCR and nonsense-mediated decay interference treatment were also performed to assess genetic compensation in mutants. Results Relative to wild-type, pdzk1 -KO larvae showed spatial frequency tuning functions with increased amplitude (likely due to abnormal gain control) and reduced ERG b -waves (suggestive of inner retinal dysfunction). No synaptic phenotypes, but possible morphological retinal phenotypes, were identified. We confirmed that the absence of major histological phenotypes was not attributable to genetic compensatory mechanisms. Conclusions Our findings point to a role for pdzk1 in zebrafish visual function, and our model system provides a platform for investigating other genes associated with abnormal visual behavior.

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Section: Methodsmentioning

confidence: 99%

Altered Visual Function in a Larval Zebrafish Knockout of Neurodevelopmental Risk Gene pdzk1

Xie

Jusuf

Bui

et al. 2021

Invest. Ophthalmol. Vis. Sci.

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“…We developed a flexible piezo-MEMS film using ultra-thin microelectromechanical system (MEMS) technology to realize the nail-deformation haptics actuator. Ultra-thin MEMS technology is adopted for fabricating, [18][19][20][21] handling, [22][23][24] and mounting [25][26][27][28] MEMS devices thinner than 10 μm. We have reported on the fabrication of MEMS actuator devices with a total thickness of several microns.…”

Section: Introductionmentioning

confidence: 99%

Development of a nail-deformation haptics device fabricated adopting ultra-thin PZT-MEMS technology

Takeshita¹,

Żymełka²,

Takei³

et al. 2022

Jpn. J. Appl. Phys.

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We describe the fabrication and evaluation of a nail-deformation haptics actuator having a flexible haptics film. The novelty of the developed actuator is the generation of a vibration that directly deforms the nail. The flexible piezo-MEMS film is fabricated adopting ultra-thin lead-zirconate-titanate MEMS and lamination technology. The flexible piezo-MEMS film has flexibility (thickness of 65 µm) and low weight (mass of 55 mg). The device can thus be attached on a nail without discomfort. A nail-deformation haptics actuator was fabricated by attaching this flexible piezo-MEMS film on an artificial nail. When a DC voltage of 40 V was applied to the film, there was distortion of −36.5 µε in the cylindrical direction of the nail and −12.1 µε in the circumferential direction. Furthermore, when an AC voltage (40 Vpp, 20 Voffset) was applied at a frequency of 50–300 Hz, strain that deformed the nail was transmitted without attenuation.

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“…Then, we developed the lead zirconate titanate (PZT) actuator fabricated by ultra-thin micro-electric mechanical system (MEMS) technology we developed [16][17][18][19][20]. The thickness of these devices is less than 10 µm.…”

Section: Introductionmentioning

confidence: 99%

Mechanical characteristics of laminated film vibrator using an ultra-thin MEMS actuator

Takeshita¹,

Nguyen²,

Żymełka³

et al. 2022

J. Micromech. Microeng.

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This paper describes fabrication of a laminated film vibrator that uses an ultra-thin micro-electric mechanical system (MEMS) and the effect of lamination on the actuator. The thickness of the ultra-thin MEMS actuator fabricated by ultra-thin MEMS technology was 7.26 µm, making it especially flexible. The vibrator was actuated by applying voltage on a lead zirconate titanate (PZT) thin film. Then, we applied a lamination method to package the actuator. However, the lamination structure influenced the mechanical characteristics of the vibrator. Therefor, we evaluated the effect of the lamination structure on the static and dynamic characteristics of the laminated film vibrator. Four types of laminated film vibrators with different layer structures were prepared, and their displacements and velocity were measured when DC and AC voltages were applied. The maximum displacement of the cantilevers constructed from the laminated film vibrator (PZT: 11 mm  11 mm) was 113.3 µm at 40 V DC. This result is in good agreement with the calculated result. Furthermore, the dynamic characteristics from both the experimental and simulated results confirmed that the resonant frequency of the laminated film vibrator depends on the film structure. This means the dynamic characteristics can be adjusted to suit the application. Applications of this laminated film actuator include use as a flexible hybrid electronics (FHE) haptic device for monitoring vital signs.

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Plastic-scale-model assembly of ultrathin film MEMS piezoresistive strain sensor with conventional vacuum-suction chip mounter

Cited by 16 publications

References 12 publications

Altered Visual Function in a Larval Zebrafish Knockout of Neurodevelopmental Risk Gene pdzk1

Altered Visual Function in a Larval Zebrafish Knockout of Neurodevelopmental Risk Gene pdzk1

Development of a nail-deformation haptics device fabricated adopting ultra-thin PZT-MEMS technology

Mechanical characteristics of laminated film vibrator using an ultra-thin MEMS actuator

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