2023
DOI: 10.1364/optica.475387
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Platform-agnostic waveguide integration of high-speed photodetectors with evaporated tellurium thin films

Abstract: Many attractive photonics platforms still lack integrated photodetectors due to inherent material incompatibilities and lack of process scalability, preventing their widespread deployment. Here, we address the problem of scalably integrating photodetectors in a photonics-platform-independent manner. Using a thermal evaporation and deposition technique developed for nanoelectronics, we show that tellurium, a quasi-2D semi-conductive element, can be evaporated at low temperatur… Show more

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Cited by 8 publications
(4 citation statements)
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“…Doped LT-TLP III–V can serve as an epi-ready spot for subsequent homo/heteroepitaxial III–V growth, enabling the development of various quantum structures through MBE or MOCVD. We believe that this novel approach to integrate III–V materials on LiNbO 3 on an insulator platform will pave the way to realizing various semiconductor-based lasers and photodetectors with versatile scalability. …”
Section: Discussionmentioning
confidence: 99%
“…Doped LT-TLP III–V can serve as an epi-ready spot for subsequent homo/heteroepitaxial III–V growth, enabling the development of various quantum structures through MBE or MOCVD. We believe that this novel approach to integrate III–V materials on LiNbO 3 on an insulator platform will pave the way to realizing various semiconductor-based lasers and photodetectors with versatile scalability. …”
Section: Discussionmentioning
confidence: 99%
“…Most of the photodetectors integrated on SiN waveguides reported in literature were based on bonded or transfer-printed III–V semiconductors, , Ge monolithically grown on Si, , and two-dimensional materials, , approaches that result in increased integration complexity. Integration of evaporated amorphous and polycrystalline photoconductors has also been demonstrated, offering promising pathways for less complex heterogeneous integration. However, such photoconductors have been associated with the observation of a notable dark current and low detectivity, , attributed to the inherent photoconductor mechanism.…”
Section: Discussionmentioning
confidence: 99%
“…Integration of evaporated amorphous and polycrystalline photoconductors has also been demonstrated, offering promising pathways for less complex heterogeneous integration. However, such photoconductors have been associated with the observation of a notable dark current and low detectivity, , attributed to the inherent photoconductor mechanism. Here, we have demonstrated the formation of QD-based photodiodes on SiN waveguides by means of standard film deposition and patterning techniques.…”
Section: Discussionmentioning
confidence: 99%
“…Moreover, the performance of these photodetectors needs further improvement, for example, to enhance dark current performance and responsivity. 11,12 Alternatively, the direct deposition on Si of GeSn alloys, [13][14][15][16] III-V quantum dots, 17 or poly-crystalline tellurium thin films 18 can result in cost-effective photodetectors with straightforward fabrication processes. However, the current implementations of these methods result in photodetectors with high dark current and low responsivity, necessitating further development.…”
Section: Introductionmentioning
confidence: 99%