Platinum growth analysis in atomic layer deposition using in-situ resistance measurement

Cho, Wen-Hao; Kei, Chi-Chung; Liu, Bo-Heng; Yu, Y. S.; Chen, Fong-Zhi

doi:10.1109/i2mtc.2016.7520534

2016 IEEE International Instrumentation and Measurement Technology Conference Proceedings 2016

DOI: 10.1109/i2mtc.2016.7520534

|View full text |Cite

Platinum growth analysis in atomic layer deposition using in-situ resistance measurement

Wen-Hao Cho

Chi-Chung Kei

Bo-Heng Liu

et al.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2024

Publication Types

Select...

Article1

Relationship

Self Cite0

Independent1

Authors

Journals

Cited by 1 publication

References 19 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

Response Surface Modelling Nafion-117 Sorption of Tetraammineplatinum(II) Chloride in the Electroless Plating of IPMCs

Manaf,

Abdeali,

Reidy

et al. 2024

Polymers

View full text Add to dashboard Cite

This work looks at the effects of a varying concentration, soak time, pH and temperature on the sorption of tetraammineplatinum(II) chloride (Pt-Ammine) in Nafion-117 films in the context of the electroless plating of ionic polymer–metal composites (IPMCs). Sorption is characterised by atomic absorption spectroscopy. A definitive screening design carried out determined all four factors to be significant for further analysis using response surface modelling. A duplicated central composite design (CCD) was utilised to characterise how the four factors affect the sorption amount and efficiency. Regression models for both responses were of poor fit. Nevertheless, key insights were obtained on the effects of the process parameters on sorption behaviour. The results indicate that above 0.5 g/L Pt-Ammine sorption, the platinisation of 10 × 50 mm IPMC samples through sodium borohydride reduction becomes redundant by the surface resistance metric. IPMCs with surface resistance values of approximately 2.5 Ω/square were obtained through only one round of chemical reduction. Varying surface morphologies and electrode thicknesses were analysed under a scanning electron microscope. The CCD parameter settings were validated. Recommended settings for optimised Pt-Ammine sorption in 10 × 50 mm Nafion-117 films were identified as follows: 1.0 g/L Pt-Ammine concentration, 24 h soak time, pH of 3 and temperature of 20 °C.

show abstract

Response Surface Modelling Nafion-117 Sorption of Tetraammineplatinum(II) Chloride in the Electroless Plating of IPMCs

Manaf,

Abdeali,

Reidy

et al. 2024

Polymers

View full text Add to dashboard Cite

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Platinum growth analysis in atomic layer deposition using in-situ resistance measurement

Cited by 1 publication

References 19 publications

Response Surface Modelling Nafion-117 Sorption of Tetraammineplatinum(II) Chloride in the Electroless Plating of IPMCs

Response Surface Modelling Nafion-117 Sorption of Tetraammineplatinum(II) Chloride in the Electroless Plating of IPMCs

Contact Info

Product

Resources

About