POEMS (Polymeric Opto-Electro-Mechanical Systems) for advanced neural interfaces

Kampasi, Komal; Ladner, Ian S.; Zhou, Jenny; Soto, Alicia Calónico; Hernandez, J.E.; Patra, S.; Haque, Razi

doi:10.1016/j.matlet.2020.129015

Cited by 12 publications

(10 citation statements)

References 46 publications

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“…Polymeric probes consist of low Young modulus materials (E ∼ 1-20 GPa 26 ) but have typically bulky and nonscalable dimensions (∼tens of μm), especially in the presence of polymeric waveguides, which have large cross-sectional dimensions (∼tens of μm × tens of μm). 27,28 As a result, our 1 mm long, 45 μm wide, After microfabricating the probes, we noticed that the tip is bent, probably due to residual stress in various layers (SiO 2 , Si 3 N 4 , SiO 2 , FOx planarization, and SiO 2 passivation). However, we did not notice a significant stress tip deflection difference between the presence or the absence of metal lines.…”

Section: A Mechanical Characterization In Airmentioning

confidence: 91%

“…10(c)]. Therefore, future work will either use wire bonding without ultrasound or other techniques (i.e., flip-chip bonding or techniques like those shown in 27 ) or redesign the silicon-oxide interface areas to avoid terminating the silicon part with a sharp tip.…”

Section: Appendix G: Electrical Assemblymentioning

confidence: 99%

“…While silicon nitride-based optoelectrodes allow for integrating a high number of sensors (dozens [15][16][17][18][19][20] to hundreds [21][22][23] ) and passive addressable light emitters (i.e., rings, 15,16 arrayed waveguide gratings, 24 or Mach-Zehnder interference switches 19 ), their high Young modulus (∼130-170 GPa 25 ) results in a material mismatch with the surrounding brain tissue and laceration during micromotions. 26 On the other hand, polymeric probes have low Young modulus (∼1-20 GPa 26 ) and thus are more flexible and reduce tissue damage, [27][28][29] but do not allow for integrating large numbers of polymeric waveguides, especially considering their bulky cross-sectional dimensions of hundreds of μm 2 [while silicon nitride waveguides around 0.06 μm 2 (Refs. 15, 16, and 20)].…”

Section: Introductionmentioning

confidence: 99%

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Neural optoelectrodes merging semiconductor scalability with polymeric-like bendability for low damage acute in vivo neuron readout and stimulation

Lanzio

Gutierrez

Hermiz

et al. 2021

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Neural optoelectrodes can read and manipulate large numbers of neurons in vivo. However, state-of-the-art devices rely on either standard microfabrication materials (i.e., silicon and silicon nitride), which result in high scalability and throughput but cause severe brain damage due to implant stiffness, or polymeric devices, which are more compliant but whose scalability and implantation in the brain are challenging. Here, we merge the gap between silicon-based fabrication scalability and low (polymeric-like) stiffness by fabricating a nitride and oxide-based optoelectrode with a high density of sensing microelectrodes, passive photonic circuits, and a very small tip thickness (5 μm). We achieve this by removing all the silicon supporting material underneath the probe's tip-while leaving only the nitride and glass optical ultrathin layers-through a single isotropic etch step. Our optoelectrode integrates 64 electrodes and multiple passive optical outputs, resulting in a cross-sectional area coefficient (the cross section divided by the number of sensors and light emitters) of 3.1-smaller than other optoelectrodes. It also combines a low bending stiffness (∼4.4 × 10 −11 N m 2 ), comparable or approaching several state-of-the-art polymeric optoelectrodes. We tested several mechanical insertions of our devices in vivo in rats and demonstrated that we can pierce the pia without using additional temporary supports.

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Section: A Mechanical Characterization In Airmentioning

confidence: 91%

Section: Appendix G: Electrical Assemblymentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Neural optoelectrodes merging semiconductor scalability with polymeric-like bendability for low damage acute in vivo neuron readout and stimulation

Lanzio

Gutierrez

Hermiz

et al. 2021

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

View full text Add to dashboard Cite

show abstract

“…It is also worth highlighting multifunctional systems that combine optical stimulation (optogenetics, infrared stimulation, microfluidic injections) with electrophysiology [ 253 , 254 , 255 , 256 , 257 , 258 , 259 , 260 , 261 , 262 , 263 , 264 , 265 , 266 , 267 , 268 , 269 , 270 , 271 ]. For example, K. Kim et al developed the HectoSTAR µLED optoelectrode (optrode) [ 272 ], which is a microelectrode combined with µLED light-emitting diodes ( Figure 6 a).…”

Section: Modern Advances In the Field Of In Vivo Penetrating Microele...mentioning

confidence: 99%

In Vivo Penetrating Microelectrodes for Brain Electrophysiology

Ерофеев

Antifeev²,

Bolshakova³

et al. 2022

Sensors

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In recent decades, microelectrodes have been widely used in neuroscience to understand the mechanisms behind brain functions, as well as the relationship between neural activity and behavior, perception and cognition. However, the recording of neuronal activity over a long period of time is limited for various reasons. In this review, we briefly consider the types of penetrating chronic microelectrodes, as well as the conductive and insulating materials for microelectrode manufacturing. Additionally, we consider the effects of penetrating microelectrode implantation on brain tissue. In conclusion, we review recent advances in the field of in vivo microelectrodes.

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“…It was only recently that fully flexible integrated photonic platforms, which utilize flexible core and cladding materials not attached to a rigid substrate were demonstrated. These designs include Polymeric Opto-Electro-Mechanical Systems (POEMS) [ 41 •• ], flexible multifunctional fibers [ 31 , 42 ], and Parylene photonics [ 43 • , 44 •• , 45 • , 46 • ]. POEMS is designed based on Cytop as the cladding and Ormocers or EpoCore as the material to form the waveguide core.…”

Section: Passive Flexible Neurophotonic Implantsmentioning

confidence: 99%