Point spread function and coherent line response in optical systems with non-uniform transmission pupils: application to photolithography

Hild, R.; Escalera, Juan C.; Yzuel, María Josefa; Muschall, R.

doi:10.1088/0963-9659/4/6/009

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Cited by 6 publications

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“…1. This filter not only decreases the DOF but also increases the intensity of the secondary maxima in the axial direction, 5 as shown by curve c of Fig. 2.…”

mentioning

confidence: 89%

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Programmable axial apodizing and hyperresolving amplitude filters with a liquid-crystal spatial light modulator

et al. 1999

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Amplitude-transmitting f ilters for apodizing and hyperresolving applications can be easily implemented by use of a two-dimensional programmable liquid-crystal spatial light modulator operating in a transmissiononly mode. Experimental results are in excellent agreement with theoretical predictions. This approach can permit the analysis of various f ilter designs and can allow the f ilters to be changed rapidly to modify the response of an optical system.

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“…1. This filter not only decreases the DOF but also increases the intensity of the secondary maxima in the axial direction, 5 as shown by curve c of Fig. 2.…”

mentioning

confidence: 89%

“…Curve b of Fig. 1 shows an example 5 of such an amplitude-transmitting filter given by t͑r͒ 6.75r 2 2 13.5r 4 1 6.75r 6 . The theoretically calculated intensity along the axis in curve b of Fig.…”

mentioning

confidence: 99%