“…A diode structure consisting of Au/n-GaAs over Ge often gives a higher ideality factor, lower barrier height, and a soft breakdown voltage due to the misfit dislocations formed inside the GaAs substrate during the heteroepitaxial growth process [1]. Unless the MOVPE growth parameters are precisely controlled, the epi-GaAs over Ge often gives antiphase domains and misfit dislocations, which gives rise to poor electrical transport characteristics [2][3][4][5][6][7]. In fact, the grown GaAs epilayer over Ge might contribute to the high density of surface states, which increases the surface recombination velocity, decreases the minority carrier lifetime, and increases the leakage at the junction, all of which worsening the GaAs/Ge solar cell performance [6,7].…”