Polarimetric interferometer for measuring nonlinearity error of heterodyne interferometric displacement system

Xu, Suan; Chassagne, Luc; Topçu, S.; Chen, Le; Sun, Jian; Yan, Tianhong

doi:10.3788/col201311.061201

Cited by 4 publications

(1 citation statement)

References 13 publications

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“…The minimum step size of the system reaches 5 nm. When building the single-frequency polarization laser interferometer, the polarizer requires strict adjustment at 45°in both directions; otherwise, phase errors will be introduced [18] , and the intensity noise generated by the laser spontaneous radiation will also affect the interferometric system [19] . The use of phase compensation and orthogonal detection technology can effectively reduce the impact of nonideal system construction and laser intensity noise [20][21][22] and improve the measurement accuracy and stability of laser interferometers.…”

Section: Introductionmentioning

confidence: 99%

Nanometer-scale displacement measurement based on an orthogonal dual Michelson interferometer

Wang,

Cai,

et al. 2023

Chin. Opt. Lett.

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In this Letter, we propose a simple structure of an orthogonal type double Michelson interferometer. The orthogonal detection method overcomes the problems of uneven ranging sensitivity and the inability of traditional interferometers to determine the displacement direction. The displacement measurement principle and signal processing method of the orthogonal double interferometer are studied. Unlike the arctangent algorithm, the displacement analysis uses the arc cosine algorithm, avoiding any pole limit in the distance analysis process. The minimum step size of the final experimental displacement system is 5 nm, which exhibits good repeatability, and the average error is less than 0.12 nm.

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Section: Introductionmentioning

confidence: 99%

Nanometer-scale displacement measurement based on an orthogonal dual Michelson interferometer

Wang,

Cai,

et al. 2023

Chin. Opt. Lett.

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Contributed Review: A review of compact interferometers

Watchi

Cooper

Ding

et al. 2018

Review of Scientific Instruments

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Compact interferometers, called phasemeters, make it possible to operate over a large range while ensuring a high resolution. Such performance is required for the stabilization of large instruments dedicated to experimental physics such as gravitational wave detectors. This paper aims at presenting the working principle of the different types of phasemeters developed in the literature. These devices can be classified into two categories: homodyne and heterodyne interferometers. Improvement of resolution and accuracy has been studied for both devices. Resolution is related to the noise sources that are added to the signal. Accuracy corresponds to distortion of the phase measured with respect to the real phase, called non-linearity. The solutions proposed to improve the device resolution and accuracy are discussed based on a comparison of the reached resolutions and of the residual non-linearities.

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Synthetic model of nonlinearity errors in laser heterodyne interferometry

2018

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The development of laser heterodyne interferometry raises the requirements of measurement resolution and accuracy. However, periodic nonlinearity errors mainly suppress the accuracy of laser heterodyne interferometry. Based on the generation mechanism of nonlinearity errors, the sources of nonlinearity errors in laser heterodyne interferometry are first analyzed in this paper. Then, a synthetic model is established to analyze the influences of various nonlinearity error sources on the first- and second-harmonic nonlinearity errors. The first-harmonic nonlinearity errors can be reduced and suppressed by adjusting the orientation error of optical elements in a heterodyne interferometer. Furthermore, the azimuthal misalignment of the polarization beam splitter (PBS) is the main source of the second-harmonic nonlinearity errors. Therefore, when in heterodyne interferometer, the azimuthal misalignment of the PBS should be avoided if possible. This study provides theoretical basis for reducing and compensating nonlinearity errors in a laser heterodyne interferometer.

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Polarimetric interferometer for measuring nonlinearity error of heterodyne interferometric displacement system

Cited by 4 publications

References 13 publications

Nanometer-scale displacement measurement based on an orthogonal dual Michelson interferometer

Nanometer-scale displacement measurement based on an orthogonal dual Michelson interferometer

Contributed Review: A review of compact interferometers

Synthetic model of nonlinearity errors in laser heterodyne interferometry

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