Polarization Control over Deep Ultraviolet Light by Subwavelength Metallic Gratings

Abstract

Using subwavelength structures to manipulate the polarization of deep ultraviolet (DUV) light is generally known as difficult with the current nano-fabrication technologies. To ease the fabrication, an aluminum grating with its period slightly smaller than the DUV wavelength was designed to exhibit an inverse polarizing effect. At resonance, a pronounced inverse polarization extinction ratio of 35 dB was obtained in our experiment.