Abstract. The behavior of the electrode systems M,O2/O 2 (M = porous Pd, Pt, A and den~ ln20~ ; 0 2. = ZrO2-based single-crystal solid electrolyte) was studied by means of impedance measurements. The examination of the Pt,O2/O 2 electrode system showed that the constant phase element (CPE) can be attributed to a nonuniform distribution of current at the electrode surface. It was observed that the CPE parameters n and B in the expression YCPE = B ( j03 )" may be related by B = (Cd0" (R~2) "~ ,where Cd~ is the double layer capacitance and Rn the resistance of the electrolyte in the cell. Then, Cj~ of the electrode -electrolyte interface could be determined. The specific Cd~ of the oxidized noble metals and india electrodes is nearly one order of magnitude lower than Ca~ of the electrodes in the metallic state. The Cd~ value of all the electrodes studied depends little or is independent of temperature and oxygen pressure. It is concluded that the Helmholtz model of double layer structure does not contradict the Cjj behavior.