“…While the first electret was discovered by the polarization of carnauba wax, 1 a wide variety of organic [2][3][4][5][6] and inorganic 7,8 dielectric materials have since been used as electret materials and their charging mechanisms have been investigated as well. 9,10 However, applications of electret films seem to be quite limited, especially in the area of microdevices; only electret condenser microphones are commercially available at the present time. 11,12 One reason for the limited use of electrets is presumably their charging manner, which involves either the absorption of polarized molecules generated by the corona discharge technique 13,14 or the injection of charged particles by ion implantation 15 into a dielectric material and thus necessitates that electret films be formed on a flat surface of the base material.…”