Abstract:The surface morphology of YBa2Cu3O7−δ (YBCO) films is crucial for applications such as multilayering and optical detection. In this article, we showed that the resputtering effect due to the rf plasma can planarize the surface morphology of YBCO films under specific conditions. By setting the relative position and angle of the heater to the gun, the plasma density over the substrate can be altered from an asymmetric to a symmetric distribution. When the substrate was near the plasma, the negative oxygen ions r… Show more
Aluminum doped zinc oxide thin films have been prepared by sputtering under argon gas pressure of 0.15 Pa at different radio frequency (RF) power densities to optimize the conditions for application in both bottom emitting and transparent OLEDs.
Aluminum doped zinc oxide thin films have been prepared by sputtering under argon gas pressure of 0.15 Pa at different radio frequency (RF) power densities to optimize the conditions for application in both bottom emitting and transparent OLEDs.
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