Poly(glycidyl methacrylate)s with controlled molecular weights as low-shrinkage resins for 3D multibeam interference lithography

Hayek, Ali; Xu, Yuheng; Okada, Takashi; Barlow, Stephen; Zhu, Xingyi; Moon, Jun Hyuk; Marder, Seth R.; Yang, Shu

doi:10.1039/b809656b

Cited by 41 publications

(38 citation statements)

References 19 publications

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“…This corresponds to $ 9% volumetric shrinkage, which is very low in comparison with 42% volumetric shrinkage 56 for the standard photo-resist SU8 and 10-26% for various methacrylate esters. 54 This is a promising result for the reduction of internal stress during photo-polymerization, and for an improvement of the dimensional accuracy of polymer micro-and nanostructures, such as those produced using nanoimprint lithography.…”

Section: Influence Of Composition and Nanostructurementioning

confidence: 99%

Conversion and shrinkage analysis of acrylated hyperbranched polymer nanocomposites

Geiser

Leterrier

2009

J of Applied Polymer Sci

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The photo-curing behavior of composites containing nanosized SiO 2 in an acrylated hyperbranched polymer matrix was investigated by means of photo differential scanning calorimetry. The chemical conversion data were analyzed using an autocatalytic model, paying close attention to the influence of composition and UV intensity. It was shown that the reaction order and the autocatalytic exponent were independent of UV intensity and filler fraction, whereas the rate constant showed strong intensity dependence, but weak filler dependence. Maximum conversion was independent of UV intensity, but was reduced when a filler was present. The dispersion state influenced the gel-point of the composites, but had no influence on the overall cure kinetics. Cure shrinkage reduction of $ 33% could be achieved by adding 20 vol% of filler. This was attributed to the reduced double bond conversion of the matrix due to the presence of the filler. V

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Section: Influence Of Composition and Nanostructurementioning

confidence: 99%

Conversion and shrinkage analysis of acrylated hyperbranched polymer nanocomposites

Geiser

Leterrier

2009

J of Applied Polymer Sci

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“…The first deals with advanced material compositions [16,[21][22][23], including the incorporation of inorganic substances [10,24]. The second possibility is to apply special material processing, such as pre-imaging, incoherent-light exposure [25,26]. The third approach concentrates on the influence of accessible parameters, namely recording intensity, exposure duration and the material's viscosity to control and adjust the optical shrinkage [13].…”

Section: Introductionmentioning

confidence: 99%

Spatially Resolved Analysis of Bragg Selectivity

Sabel¹

2015

Applied Sciences

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This paper targets an inherent control of optical shrinkage in photosensitive polymers, contributing by means of spatially resolved analysis of volume holographic phase gratings. Point by point scanning of the local material response to the Gaussian intensity distribution of the recording beams is accomplished. Derived information on the local grating period and grating slant is evaluated by mapping of optical shrinkage in the lateral plane as well as through the depth of the layer. The influence of recording intensity, exposure duration and the material viscosity on the Bragg selectivity is investigated.

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“…In particular volumetric deformations may cause a Bragg angle detuning by means of altered grating constants with the result of a disturbed selectivity and optical functionality. [12] As a consequence, many efforts are made to reduce shrinkage as an undesired side effect in terms of advanced material compositions, [9,13,14] special material processing [15] or by means of incorporation of inorganic substances. [16,17] Cationic ring-opening polymerization (CROP) systems show some advantages compared with the freeradically polymerizing materials.…”

Section: Introductionmentioning

confidence: 99%

Dynamic Bragg Angle Shift in the Course of Volume Hologram Formation

Sabel

Zschocher²

2013

Materials Research Letters

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Real-time investigation of Bragg angle shift during volume hologram formation is presented in an organic cationic ring-opening polymerization material. Positive as well as negative values of optical shrinkage are found, assumedly related to mechanical deformations of the volume and a change of the average refractive index, respectively. Ruled by the interplay of polymerization and diffusion, the originate grating formation mechanisms prove to represent competing effects regarding the contribution to the optical shrinkage. The influence of sample preparation and holographic exposure procedure on the effects observed is investigated and the usability for minimization of total Bragg resonance detuning is considered.

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Poly(glycidyl methacrylate)s with controlled molecular weights as low-shrinkage resins for 3D multibeam interference lithography

Abstract: Poly(glycidyl methacrylate) has been shown to be a useful material for fabrication of photonic crystal templates using multibeam interference lithography, since it exhibits lower shrinkage than conventional SU8.

Cited by 41 publications

References 19 publications

Conversion and shrinkage analysis of acrylated hyperbranched polymer nanocomposites

Conversion and shrinkage analysis of acrylated hyperbranched polymer nanocomposites

Spatially Resolved Analysis of Bragg Selectivity

Dynamic Bragg Angle Shift in the Course of Volume Hologram Formation

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