1998
DOI: 10.1021/ma9808070
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Poly(p-xylylene) and Its Derivatives by Chemical Vapor Deposition:  Synthesis, Mechanism, and Structure

Abstract: Poly(p-xylylene) (PPX) and its derivatives were prepared by vapor-phase pyrolysis and subsequent chemical vapor deposition (CVD) of the pyrolysis products. Readily available esters of R,R′-dihydroxy-p-xylylenes were utilized as starting materials. Mechanistical studies prove that 1,4-quinodimethane is formed by pyrolysis of diesters. The PPXs obtained compare well to PPXs obtained by the classical route using [2.2]paracyclophanes. 13 C CP-MAS NMR spectroscopy indicates that the arrangement of substituents alon… Show more

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Cited by 49 publications
(32 citation statements)
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“…In the case of the CVD process, the generation of gaseous p-xylylene can be achieved, for example, by direct pyrolysis of p-xylene 6,61) , the thermal cleavage of [2.2]paracyclophane 10) , or the thermal conversion of ahalo-1,4-xylene 22) or diesters of a,a9-dihydroxy-1,4-xylene 11,65) . The formation of p-xylylene in solution can be accomplished by the procedure of Gilch and Wheelwright 21,62) , where an a-halo-1,4-xylene in solution is treated with base.…”
Section: Generalmentioning
confidence: 99%
“…In the case of the CVD process, the generation of gaseous p-xylylene can be achieved, for example, by direct pyrolysis of p-xylene 6,61) , the thermal cleavage of [2.2]paracyclophane 10) , or the thermal conversion of ahalo-1,4-xylene 22) or diesters of a,a9-dihydroxy-1,4-xylene 11,65) . The formation of p-xylylene in solution can be accomplished by the procedure of Gilch and Wheelwright 21,62) , where an a-halo-1,4-xylene in solution is treated with base.…”
Section: Generalmentioning
confidence: 99%
“…However, the monomeric species must be volatile. Vapor phase processes can be classified depending on the deposition mechanism: chain growth (e.g., plasma enhanced chemical vapor deposition, PECVD7, 8) and step growth polymerization (e.g., vapor deposition polymerization, VDP9 or CVD grown parylene6, 10). Chain growth and step growth mechanisms have been demonstrated also for initiated CVD (iCVD) and oxidative CVD (oCVD), respectively.…”
Section: Introductionmentioning
confidence: 99%
“…Although α,α′‐dihydroxy‐ p ‐xylylenes,50, 51 α,α′‐ dibromo‐ p ‐xylylenes,52 α‐chloro‐ p ‐xylylenes,53 and α,α′‐diacetoxy‐ p ‐xylylenes54 provide potential candidates for functionalized poly( p ‐xylylene)s as they all have been shown to undergo CVD polymerization, substituted [2.2]paracyclophanes have been the preferred precursors for CVD polymerization—at least in our hands 55. Scheme summarizes the synthesis of [2.2]paracyclophanes with various functional groups.…”
Section: Cvd Polymerization Of Substituted [22]paracyclophanes: Reacmentioning
confidence: 99%