Polybenzoxazoles. Synthesis and properties of poly-(dibenzoxazolylsulphones)

Yakubovich, A.Ya.; Oleinik, A. F.; Braz, G.I.; Voznesenskaya, N.N.; Yakubovich, V.S.; Kardash, I. E.; Ardashnikov, A.Ya.

doi:10.1016/0032-3950(67)90453-4

Cited by 11 publications

(1 citation statement)

References 5 publications

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“…This compound was prepared with a modified method of the literature 20. To a solution of sodium nitrate (6.40 g, 75.0 mmol) in water (30 mL) was added concentrated H 2 SO 4 (8.0 g, 120 mmol).…”

Section: Methodsmentioning

confidence: 99%

Synthesis of a highly transparent poly(o‐hydroxyamide) in the i‐line region and its application to photosensitive polymers

Toyokawa

Fukukawa

Shibasaki

et al. 2005

J. Polym. Sci. A Polym. Chem.

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A novel poly(o-hydroxyamide) (PHA) based photosensitive polymer that exhibits high transparency at 365 nm wavelength (i-line) has been developed. Timedependent density functional theory (TD-DFT) calculations using the B3LYP hybrid functional were performed to predict the transparencies of various hydroxyamides in the i-line region. Based on the calculations, 4,4 0 -sulfonylbis(o-aminophenol) (SAP) was prepared and polymerized with 4,4 0 -oxybis(benzoyl chloride) (OBBC), and the resulting PHA, which is abbreviated as PHA-S, showed a high transparency comparable to that of PHA derived from 4,4 0 -(hexafluoroisopropylidene)bis(o-aminophenol). Positive-type photosensitive PHA was then formulated based on PHA-S with a crosslinker 1,3,5-tris[(2-vinyloxy)ethoxy]benzene (TVEB) and a photoacid generator (5-propylsulfonyloxyimino-5H-thiophen-2-ylidene)-2-(methylphenyl)acetonitrile (PTMA) (17:3:1 in weight ratio), and demonstrated photosensitivity and contrast of 14 mJ/cm 2 and 2.7, respectively, when the resist film was prebaked at 120 8C for 5 min, irradiated by i-line, post exposure baked at 120 8C for 5 min, developed with an 2.38 wt% TMAH solution for 5 s. A clear positive image featuring 10-mm line-and-space was also printed in a film which was exposed to 50 mJ/cm 2 of i-line by contact-printing.

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Section: Methodsmentioning

confidence: 99%