2020
DOI: 10.7567/1347-4065/ab65d2
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Polycrystalline silicon metal-oxide-semiconductor field-effect transistor-based stacked multi-layer one-transistor dynamic random-access memory with double-gate structure for the embedded systems

Abstract: In this work, a polycrystalline silicon (poly-Si) double-gate metal-oxide-semiconductor field-effect transistor-based stacked multi-layer (ML) onetransistor dynamic random-access memory for the embedded memory is proposed using technology computer-aided simulation. Although poly-Si has advantages of low-cost fabrication and implementation of three-dimensional structure, poly-Si devices suffer from low on-state current (I on ) due to the low mobility and the scattering by the grain boundary (GB) trap. The stack… Show more

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Cited by 6 publications
(3 citation statements)
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“…Also, the grain size assumed 20 nm when GBs exist at the source and drain in the n+ doping region. The trap density of the GBs in the proposed 1T-DRAM used data, as shown in Figure 2 of reference [ 21 ]. There are four traps in the GB: donor-like shallow trap (DST), donor-like deep trap (DDT), acceptor-like shallow trap (AST), and acceptor-like deep trap (ADT).…”
Section: Device Structure and Simulation Methodologymentioning
confidence: 99%
“…Also, the grain size assumed 20 nm when GBs exist at the source and drain in the n+ doping region. The trap density of the GBs in the proposed 1T-DRAM used data, as shown in Figure 2 of reference [ 21 ]. There are four traps in the GB: donor-like shallow trap (DST), donor-like deep trap (DDT), acceptor-like shallow trap (AST), and acceptor-like deep trap (ADT).…”
Section: Device Structure and Simulation Methodologymentioning
confidence: 99%
“…The geometric parameters of the proposed device are summarized in Table I. In addition, the trap density in GB of the proposed device was used the calibrated data in [17], there are four trap states: donor like shallow trap, donor like deep trap, acceptor like shallow trap, acceptor like deep trap. In this simulation, physics models such as the Shockley-Read-Hall (SRH) recombination, the Hurkx trap-assisted tunneling (TAT), the nonlocal band-to-band tunneling (BTBT) model, the Fermi-Dirac statistical model, the doping-dependent model, and the quantum-confinement effect model are simultaneously applied.…”
Section: Device Structure and Simulation Methodsmentioning
confidence: 99%
“…In recent years, 1T-DRAM devices with poly-Si bodies have been studied to overcome the limitations of silicon 1T-DRAM [ 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 ]. Since the poly-Si devices use grain boundaries (GBs) instead of a FB as a charge storage region, they can perform memory operations in a FD-SOI structure [ 15 ].…”
Section: Introductionmentioning
confidence: 99%