Dehydration and complexation reactions of [Y(TFA)3(H2O)3] (1; TFA = O2CCF3) were investigated with O‐ and N‐donor ligands in order to obtain suitable precursors for MOD (Metal Organic Deposition). Anhydrous adducts such as [Y2(μ,η2‐TFA)4(η1‐TFA)2(OHC2H4OiPr)4] (3), [Y2(μ,η2‐TFA)4(η1‐TFA)2(OHC2H4OC2H4OMe)2] (4), or [Y(TFA)3(triglyme)] (5) were isolated. The reactions with N‐donor ligands are more complex and afford mixed‐ligand derivatives such as [Y(TFA)3(H2O)2(LL)]m [LL = TMEDA (9), Me2NC2H4NMeC2H4NMe2 (10)] and, in the case of primary amines, yttrium oxohydroxo derivatives such as [H3O][Y3(μ3‐OH)(μ‐O)3(η1‐TFA)3(H2O)6(en)3] (6; en = NH2C2H4NH2). All complexes were characterized by elemental analysis, FT‐IR, and by single‐crystal X‐ray diffraction for 3, 4, and 6. All structurally characterized complexes contain on eight‐coordinate Y centers. Perfluorobutyrate and difluoroacetate derivatives were also prepared. (© Wiley‐VCH Verlag GmbH & Co. KGaA, 69451 Weinheim, Germany, 2005)