Polymer-based capacitive humidity sensor: characteristics and experimental results

Delapierre, G.; Grange, H.; Chambaz, Bernard; Destannes, L.

doi:10.1016/0250-6874(83)85013-6

Cited by 72 publications

(28 citation statements)

References 3 publications

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“…2 Sensors are required to secure these toxic industrial chemicals from potential terrorists and for everyday industrial operations such as monitoring storage, transport, process control, and waste management. Chemicapacitors have been used primarily to detect humidity 3,4 ; however, recently they have been reported to detect many different compounds, including solvents, common volatile organic compounds (VOCs) 5,6,7 , toxic industrial chemicals 8 , chemical warfare agents 8 , and inorganic gases such as carbon dioxide 9 and ammonia 10 . The specifics of the detection mechanisms have been studied previously 5,7 and have been found to rely on a combination of interactions arising from vapor sorption, including polymer swelling and other changes in the morphology.…”

Section: Introductionmentioning

confidence: 99%

Chemicapacitive microsensors for detection of explosives and TICs

et al. 2005

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Seacoast Science develops chemical sensors that use polymer-coated micromachined capacitors to measure the dielectric permittivity of an array of selectively absorbing materials. We present recent results demonstrating the sensor technology's capability to detect components in explosives and toxic industrial chemicals.These target chemicals are detected with functionalized polymers or network materials, chosen for their ability to adsorb chemicals. When exposed to vapors or gases, the permittivity of these sorbent materials changes depending on the strength of the vapor-sorbent interaction. Sensor arrays made of ten microcapacitors on a single chip have been previously shown to detect vapors of organic compounds (chemical warfare agents, industrial solvents, fuels) and inorganic gases (SO 2 , , CO 2 , NO 2 ).Two silicon microcapacitor structures were used, one with parallel electrode plates and the other with interdigitated "finger-like" electrodes. The parallel-plates were approximately 300 µm wide and separated by 750 nm. The interdigitated electrodes were approximately 400 µm long and were elevated above the substrate to provide faster vapor access. Eight to sixteen of these capacitors are fabricated on chips that are 5 x 2 mm and are packaged in less than 50 cm 3 with supporting electronics and batteries, all weighing less than 500 grams. The capacitors can be individually coated with different materials creating a small electronic nose that produces different selectivity patterns in response to different chemicals. The resulting system's compact size, low-power consumption and low manufacturing costs make the technology ideal for integration into various systems for numerous applications.

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Section: Introductionmentioning

confidence: 99%

Chemicapacitive microsensors for detection of explosives and TICs

et al. 2005

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“…The device is a chemicapacitive sensor with an embedded nanotube replacing one of the metal plates. A schematic geometry of the proposed sensor is compared to that of a traditional chemicapacitive sensor [1,2] in Fig. 1.…”

Section: Introductionmentioning

confidence: 99%

Numerical modeling of nanotube embedded chemicapacitive sensors

Rusak

Akturk

Goldsman

2007

2007 International Semiconductor Device Research Symposium

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“…The amount of the VOC in the ambient and its reactivity with the polymer determine the response of the sensor. For example, researchers have used resistive sensors [3] to measure swelling of the polymer; capacitive sensors [4,5] to measure changes in polymer permeability, just to mention a few.…”

Section: Introductionmentioning

confidence: 99%