2011
DOI: 10.1017/s1759078711000079
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Polymer-based micromachined rectangular coaxial filters for millimeter-wave applications

Abstract: In this paper, micromachined devices for millimeter-wave applications at U- and V-bands are presented. These structures are\ud designed using a rectangular coaxial line built of gold-coated SU-8 photoresist layers, where the coaxial center conductor is\ud suspended in air by stubs. The designs include a stepped coplanar waveguide (CPW)-to-coaxial transition at 63 GHz, with an\ud insertion loss of 0.39 dB at 67.75 GHz and a return loss better than 210 dB across the band of operation between 54.7 and\ud 70.3 GHz… Show more

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Cited by 5 publications
(7 citation statements)
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“…In Ref. [5], a transition from RMCL to CPW was proposed, achieving GSG ports up to 70 GHz for on‐chip testing with a simpler 5‐layer structure. Similarly, Ref.…”
Section: Introductionmentioning
confidence: 99%
“…In Ref. [5], a transition from RMCL to CPW was proposed, achieving GSG ports up to 70 GHz for on‐chip testing with a simpler 5‐layer structure. Similarly, Ref.…”
Section: Introductionmentioning
confidence: 99%
“…Ka-band SIW BPFs are also reported in [8]- [11] using dielectric-filled [9], [11] and airfilled [8] SIWs. 3-D high-quality factor (Q) air-filled BPFs using SU-8 coaxial resonators and silicon-based resonators are discussed in [12]- [14] having low levels of IL between 0.5 and 0.8 dB, however, they are large in size and cannot be easily integrated with other IC components.…”
Section: Introductionmentioning
confidence: 99%
“…The CPW interface can also be used to interconnect the polymer based circuits with other components. This paper presents the design of a SU-8 coaxial filter at 42 GHz, and includes further comprehensive simulation results, additional design details and a discussion of the fabrication process flow compared to recently published work [3].…”
Section: Introductionmentioning
confidence: 99%