Polymer deformable membrane mirrors for focus control using SU-8 2002

Dunbar, E.; Leone, Marco; Lukes, Sarah J.; Dickensheets, David L.

doi:10.1109/omems.2008.4607867

Cited by 4 publications

(7 citation statements)

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“…This is comparable to the deflections and forces reported by the authors of refs. [7,8], taking into account differences in distance between actuator and mirror.…”

Section: Experiments and Resultsmentioning

confidence: 99%

“…Following partly a procedure reported by Dunbar et al [8], we begin by creating a highly flexible mebrane structure with the SU8 photoresist [9], as shown in Figure 1. A double-polished undoped silicon substrate with [110] orientation is first prepared by coating with 10nm of chromium on both sides with a standard thermal evaporation technique.…”

Section: Microfabricationmentioning

confidence: 99%

“…This allows us to use electrostatic actuators instead of piezoelectric elements, and may allow us to operate the device at higher frequencies. Inspired by work on large stroke membranes designed for focusing applications [7,8], we develop a process based on a photoresist material and introduce metallic layers to a multilayer membrane system in order to control the rigidity of a deformable mirror over a significant range. Although we do not apply these deformable mirrors directly to pulse shaping in this work, we report on their mechanical characteristics.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication of a deformable mirror for pulse shaping

2011

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In this work we report on a fabrication method for producing large-area multilayer polymer membranes and describe its application to the instrumentation of a deformable mirror. This implementation allows for highly flexible mirrors in which mechanical properties vary in a controlled manner in order to better match optical requirements. In addition, the mechanical properties of such membranes allow for a large number of closely spaced actuators. We report on the mechanical properties of metal-polymer membranes and discuss their application to pulse shaping experiments.

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“…This is comparable to the deflections and forces reported by the authors of refs. [7,8], taking into account differences in distance between actuator and mirror.…”

Section: Experiments and Resultsmentioning

confidence: 99%

Section: Microfabricationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Fabrication of a deformable mirror for pulse shaping

2011

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“…The SU-8 membrane mirror used for the feedback control tests has been previously described [2]. The device was fabricated by bonding one silicon wafer with an SU-8 2002 membrane to another wafer with drive electrodes and an SU-8 2010 spacer layer, as shown in Figure 1.…”

Section: Device Descriptionmentioning

confidence: 99%

Variable-focus SU-8 membrane mirror with enhanced stroke using feedback control

Lukes

Lutzenberger

Dunbar

et al. 2009

2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics

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We describe enhanced deflection of an electrostatic deformable mirror made from SU-8 epoxy. Using closed-loop feedback control, stable static deflection of a circular mirror to 75% of the air-gap has been achieved. IntroductionDeformable membrane mirrors are effective adaptive optical elements for focus and achromatic wavefront control. An inherent limitation for these membranes and other devices driven under electrostatic actuation is snapdown. The usable range of motion is restricted to approximately 44% of the air gap for circular deformable membranes [1]. Overcoming the snapdown limitation will provide increased stroke resulting in a greater range of variable optical power.We describe here the use of capacitive displacement sensing and closed-loop voltage control in order to increase the stable range of actuation. Specifically, this paper explores the performance of a feedback control scheme with a 2 mm diameter SU-8 2002 epoxy membrane mirror. We have observed stable static deflection to 75% of the air gap for this device. In addition we note a "softer" snapdown behavior with significantly reduced contact area and diminished likelihood of catastrophic stiction.

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“…Among many others, the University of California, Los Angeles is concerned with the development of electrostatic driven scanning mirrors [9]. A 3D mirror was presented by Montana State University [10]. IMT Neuchatel presented an actuator chip for optical alignment [11], Asia Pacific Microsystems realized a Variable Optical Attenuator (VOA) by a pair of adjustable mirrors in chip plane [12], Axsun Technologies focuses on Fabry-Perot-Filters applied in the field of spectroscopy [13] and Nanyang Technical University developed an modulator for coupled-cavity laser tuning [14].…”

Section: Introductionmentioning

confidence: 99%

The high versatility of silicon based micro-optical modulators

Schenk

2009

SPIE Proceedings

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"One product, one process": This MEMS law is true for micro-optical modulators, too and thus puts a high load on every product and technology development team. On the other hand the law expresses nothing but the high versatility of the underlying usually silicon based technology. A huge variety of applications where an electromagnetic wave experiences a spatial-temporal modulation makes use of this technology: High resolution as well as ultra-compact displays, optical switches in telecommunication as well as data storage devices, spectrometers e. g. for quality control, as well as adaptive optics and pattern generation to mention only a few. The applications completely differ with regard to the requirements in almost all aspects. The most important drivers to use silicon based micro-optical modulators are high accuracy, high bandwidth and high miniaturization. A continuous further development of the technology can be reported. Novel optical, mechanical and electrical working principles are investigated to meet future requirements. After a short overview of the most typical applications of silicon based micro-optical modulators the high versatility of this technology is detailed by means of selected devices and applications. Single 1D and 2D micro mirrors with diameters of up to 4 mm e. g. for projection, imaging and spectroscopy are as well presented and discussed as micro mirror arrays comprising up to 1 million analog deflectable mirrors for image generation and phase modulation in microlithography and adaptive optics

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Polymer deformable membrane mirrors for focus control using SU-8 2002

Cited by 4 publications

References 1 publication

Fabrication of a deformable mirror for pulse shaping

Fabrication of a deformable mirror for pulse shaping

Variable-focus SU-8 membrane mirror with enhanced stroke using feedback control

The high versatility of silicon based micro-optical modulators

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