Microreaction Technology: Industrial Prospects 2000
DOI: 10.1007/978-3-642-59738-1_10
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Polymer nanowell plates with variable well slope angles

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Cited by 4 publications
(7 citation statements)
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“…The mask defines the ablated region, while the complete pattern is made by moving the substrate on the x-y stage underneath the mask. Depending on the energy available per laser pulse and on the substrate material, typical ablation rates per laser pulse range between some hundred nanometers [49,50] and 5 mm [49]. With this technology, a wide range of polymeric materials, including PMMA, PS, PC polyethyleneterephthalate (PET), cellulose acetate, polyimide and photoresists have been structured [47±50].…”
Section: Laser-based Technologiesmentioning
confidence: 99%
“…The mask defines the ablated region, while the complete pattern is made by moving the substrate on the x-y stage underneath the mask. Depending on the energy available per laser pulse and on the substrate material, typical ablation rates per laser pulse range between some hundred nanometers [49,50] and 5 mm [49]. With this technology, a wide range of polymeric materials, including PMMA, PS, PC polyethyleneterephthalate (PET), cellulose acetate, polyimide and photoresists have been structured [47±50].…”
Section: Laser-based Technologiesmentioning
confidence: 99%
“…This enables the creation of polymer-based microfluidic structures [103,104]. The depth and width of the channels are adjusted by the laser intensity and repetition of the beam exposure along the same channel.…”
Section: Laser Ablation Micromachiningmentioning
confidence: 99%
“…Depending on the energy per laser pulse and the material of the used substrate, the ablation rates per pulse are about 0.1-5 μm [103,104]. Ranges of polymeric material have been used with this method, including PMMA, PS, PC (PET) [105,106].…”
Section: Laser Ablation Micromachiningmentioning
confidence: 99%
“…This concept could be applied to the area of combinatorial generation of substances and compounds or to the area of micrototal analysis systems (μTAS). 10 In μTAS concepts, the only step carried out outside the microdevice environment is the addition of sample and reagents. Other necessary steps for total analysis might involve analyte isolation, concentration, dilution, amplification, labeling, or incubation.…”
Section: Microreactorsmentioning
confidence: 99%
“…Figure 9 provides SEM images of nanowell crossections and top geometry in a process initiated with the microfabrication of a master using UV-LIGA ablation of PMMA coated over a titanium wafer. 14,15 In the study by Becker and Klotzbücher 10 , the careful selection of the Excimer ablation parameters permitted the generation of very smooth microfabricated surfaces defining the wells. Furthermore, it permitted the control of the slope of the wall at 45–90 degrees for the nanowell as a means to affect the dispensing of liquids and microparticles into the nanowells for the intended functionality of these microarrays.…”
Section: Microarraysmentioning
confidence: 99%