Polyethylene terephthalate (PET) surfaces were treated with CH4/CF4 plasmas and the surface structures as well as the dynamic behaviour of the modified surfaces after water immersion were studied using angle‐dependent x‐ray photoelectron spectroscopy (XPS). It was found that the fluorocarbon plasma treatment resulted in the formation of some fluorine‐containing groups, which improve the surface hydrophobicity of the PET films. The extent of surface modification is dependent on the molar ratio of the CH4/CF4 feed gases used in the plasma. The hydrophobicity of the modified PET films decreased after they were immersed in water, partly as a result of the ‘turnover’ or movement of the fluorine‐containing groups from the surface to the bulk. From XPS analysis, it was found that the movement of the fluorine‐containing groups depends on the modified surface structures. The turnover rates can be described by a decay constant k of surface dynamics; the larger the k value, the faster the movement of the fluorine‐containing groups. Experiments showed that the degree of surface modification is higher and is maintained for a longer period for CH4/CF4 mixed plasmas as compared to that treated by pure CF4 plasma. The effect of the molar ratio of CH4/CF4 feed gases and its relationship with the movement of the fluorine‐containing surface groups were discussed. Copyright © 1999 John Wiley & Sons, Ltd.