Polymer Surface Modification Using Microwave-Oven-Generated Plasma

Ginn, Brent T.; Steinbock, Oliver

doi:10.1021/la034138h

Cited by 121 publications

(100 citation statements)

References 10 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…In brief, the claims are as follows: (1) positioning a vacuum chamber within the MRC with embodiments for admitting gas into the vacuum chamber and through the cavity and for extracting gas by-products from the vacuum chamber; (2) relating to claim 1, where a means of regulating the gas to generate uniform plasma in the vacuum chamber; (3) a moving antenna for a means of generating a time average of uniform plasma; (4) a rotating antenna for a means of generating a time average of uniform plasma; (5) a means of reducing microwave leakage around each feedthrough; (6) a means of water cooling substrates within the vacuum chamber during plasma etching without thermal damage to the substrate during the plasma etch process; (7) relating to claim 6, where the water tubes have a heat transfer relationship with the vacuum chamber with a means of microwave leakage prevention; (8) a means of controlling microwave power; (9) relating to claim 8, a potentiometer in series with the primary transfer side of the magnetron transformer for controlling the maximum power in the oven; (10) relating to claim 9, when plasma etching of organics from substrate; and finally, (11) relating to claim 10, the use of water cooling of the substrate. Beyond Ribner's patent, some studies [11][12][13][14][15][16][17][18][19][20][21][22] show that the microwave oven plasma reactor can be used for a multitude of processes and in many levels of oven reconstruction. e following sections describe the changes required to conventional domestic microwave ovens that range from minimal to major.…”

Section: Converted Microwave Oven Plasmamentioning

confidence: 99%

“…More recently (2017), carbothermic reduction of zinc oxide and zinc ferrites has also been reported [9]. Once the first conversion of a microwave oven into a plasma reactor was reported in 1978 [10], plasma-induced synthesis of inorganic compounds became available [11][12][13], followed by plasma modification of polymer surfaces [14]. Interest in the conversion of microwave oven for plasma processing has also been reported for plasma pyrolysis paper [15,16] and in-liquid plasma decomposition to produce hydrogen gas and carbon films [17][18][19][20][21].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Converting a Microwave Oven into a Plasma Reactor: A Review

Law

Dowling

2018

International Journal of Chemical Engineering

View full text Add to dashboard Cite

is paper reviews the use of domestic microwave ovens as plasma reactors for applications ranging from surface cleaning to pyrolysis and chemical synthesis. is review traces the developments from initial reports in the 1980s to today's converted ovens that are used in proof-of-principle manufacture of carbon nanostructures and batch cleaning of ion implant ceramics. Information sources include the US and Korean patent office, peer-reviewed papers, and web references. It is shown that the microwave oven plasma can induce rapid heterogeneous reaction (solid to gas and liquid to gas/solid) plus the much slower plasma-induced solid state reaction (metal oxide to metal nitride). A particular focus of this review is the passive and active nature of wire aerial electrodes, igniters, and thermal/chemical plasma catalyst in the generation of atmospheric plasma. In addition to the development of the microwave oven plasma, a further aspect evaluated is the development of methodologies for calibrating the plasma reactors with respect to microwave leakage, calorimetry, surface temperature, DUV-UV content, and plasma ion densities.

show abstract

Section: Converted Microwave Oven Plasmamentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Converting a Microwave Oven into a Plasma Reactor: A Review

Law

Dowling

2018

International Journal of Chemical Engineering

View full text Add to dashboard Cite

show abstract

“…QA = 2 corresponds to permanent adhesion, QA = 1 corresponds to permanent adhesion, partially distributed throughout the contact interfaces, and QA = 0 corresponds to reversible or no adhesion becoming apparent. The use of GHz plasma generator (Ginn and Steinbock 2003;Hui et al 2005) on the other hand, results in relatively fast sample heating, which may prove detrimental for the fabrication procedures.…”

Section: Plasma Treatments and Quality Of Adhesionmentioning

confidence: 99%

Dependence of the quality of adhesion between poly(dimethylsiloxane) and glass surfaces on the composition of the oxidizing plasma

Chau

Millare

Lin

et al. 2010

Microfluid Nanofluid

View full text Add to dashboard Cite

Controlled surface oxidation of polydimethylsiloxane (PDMS) is essential for permanent adhesion between device components composed of this elastomer. The permanent adhesion between such microdevice components results from covalent crosslinking across the interfaces between PDMS and other silica-based materials, such as glass, quartz, and PDMS. Optimal duration and conditions of oxidation, attained via treatments with oxygen-containing plasma, are crucial for microfabrication procedures with quantitative yields. While insufficient PDMS oxidation does not provide high enough surface density of siloxyl groups for cross-interface linking, overoxidation of PDMS yields rough silica surface layers that prevent the adhesion between flat substrates. Ideally, for a set of plasma conditions, the range of treatment durations producing permanent adhesion should be as broad as possible: i.e., the surface oxidation of PDMS sufficient for irreversible binding has to complete significantly before the effects of overoxidation become apparent. Such a requirement assures that relatively small fluctuations in the treatment conditions will not result in over-or under-oxidation and, hence, will not compromise the yields of the fabrication procedures. We examined the dependence of the quality of adhesion (QA) between plasma-treated PDMS and glass substrates on the composition of the oxygen-containing plasma and on the radio frequency (RF) of the plasma generator. We observed that plasma generated at megahertz RF provided superior conditions than kilohertz RF. Concurrently, an increase in the oxygen content of binary gas mixtures, used for the plasma, broadened the treatment durations that afford superior QA.

show abstract

“…In the past, the surface properties of PDMS has been modified using different methods such as coating of the inner walls, 7 attachment of active groups, 8 plasma oxidation, 9 thermal aging, 10 and chemical coating. 11 However, most methods require hours to process and to characterize before one can effectively use the devices.…”

Section: Introductionmentioning

confidence: 99%

Oxygen plasma treatment for reducing hydrophobicity of a sealed polydimethylsiloxane microchannel

et al. 2010

View full text Add to dashboard Cite

Rapid prototyping of polydimethylsiloxane ͑PDMS͒ is often used to build microfluidic devices. However, the inherent hydrophobic nature of the material limits the use of PDMS in many applications. While different methods have been developed to transform the hydrophobic PDMS surface to a hydrophilic surface, the actual implementation proved to be time consuming due to differences in equipment and the need for characterization. This paper reports a simple and easy protocol combining a second extended oxygen plasma treatments and proper storage to produce usable hydrophilic PDMS devices. The results show that at a plasma power of 70 W, an extended treatment of over 5 min would allow the PDMS surface to remain hydrophilic for more than 6 h. Storing the treated PDMS devices in deionized water would allow them to maintain their hydrophilicity for weeks. Atomic force microscopy analysis shows that a longer oxygen plasma time produces a smoother surface.

show abstract

Polymer Surface Modification Using Microwave-Oven-Generated Plasma

Cited by 121 publications

References 10 publications

Converting a Microwave Oven into a Plasma Reactor: A Review

Converting a Microwave Oven into a Plasma Reactor: A Review

Dependence of the quality of adhesion between poly(dimethylsiloxane) and glass surfaces on the composition of the oxidizing plasma

Oxygen plasma treatment for reducing hydrophobicity of a sealed polydimethylsiloxane microchannel

Contact Info

Product

Resources

About