Polymeric MST - high precision at low cost

Elderstig, H.; Larsson, Olle

doi:10.1088/0960-1317/7/3/002

Cited by 8 publications

(3 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Electroplating of microstructures is widely used in combination with optically or x-ray patterned thick resist. In combination with silicon, electroplating has been used to fabricate tools for injection molding and hot embossing [6]. For this work, copper has been plated onto silicon molds in order to fabricate EDM electrodes.…”

Section: Electroplatingmentioning

confidence: 99%

Electro-discharge machining of mesoscopic parts with electroplated copper and hot-pressed silver tungsten electrodes

Stampfl

Leitgeb

Cheng

et al. 1999

J. Micromech. Microeng.

View full text Add to dashboard Cite

Recent advances in the development of plasma etchers for silicon has brought machines to the market which are able to etch silicon with high etch rates (>5 µm min −1) at high anisotropy (taper of sidewalls <1.5 •). Micromachined silicon is therefore not only suitable for applications in micromechanics but it can also fill the gap which exists between conventional macromachining (milling, turning) with feature sizes usually >1 mm and microelectromechanical systems with feature sizes <100 µm. In this work micromachined silicon is used as a mold for electroplating copper and for hot-pressing silver tungsten. After removing the silicon, the copper or silver-tungsten is used as an electrode for electro-discharge machining. Using these process steps nearly any conductive material can be shaped, in particular magnetic materials like amorphous metal which are difficult or impossible to machine otherwise. The fabrication of the electrodes is described as well as the influence of the electrode material on the achieved quality of the final part.

show abstract

Section: Electroplatingmentioning

confidence: 99%

Electro-discharge machining of mesoscopic parts with electroplated copper and hot-pressed silver tungsten electrodes

Stampfl

Leitgeb

Cheng

et al. 1999

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…Recently, several MEMS devices have been applied to biological researches, such as a MEMS-based force sensor (Yang and Saif, 2006), and a frequency depedent electrostatic actuator (Scuor, Gallina, Panchawagh, Mahajan, and Sbaizero, 2006). Compared to these single crystal silicon and polysilicon devices, polymer devices have several advantages, such as: less possibility of damaging live cells when making physical contact due to the low Young's modulus of polymers; lower cost (Elderstig and Larsson, 1997); and lastly, the ability to operate in liquids if an electrothermal actuation mechanism is used (the heat is insulated due to the low thermal conductance of polymers). This paper reports a polymer-based MEMS system for measuring the mechanical properties of a live cell.…”

Section: Introductionmentioning

confidence: 99%

Polymer Mems System for Measuring the Mechanical Modulus of a Biological Cell

Zhang¹,

Gnerlich²,

Sun³

et al. 2008

Proceedings of the First International Conference on Biomedical Electronics and Devices

View full text Add to dashboard Cite

The measurements of the mechanical modulus of biological cells are critical to studies of pathophysiology and the research for an effective treatment. This research has developed a rapid and cost effective technique in order to measure the Poisson's ratio and mechanical modulus of a live biological cell by utilizing microelectromechanical system (MEMS) techniques in a biological application. The design, fabrication, and characterization of a polymer-based MEMS system that integrates a V-shaped electrothermal actuator array and a cell-positioning system in a single microelectronics chip are presented here. This BioMEMS device compressed a NIH3T3 fibroblasts cell and caused up to 25% mechanical strain.

show abstract

“…Several groups have been very successful in making microstructures by the micro hot embossing process. These include groups at the Forschungszentrum, Karlsruhe, Germany [Bacher et al (1995)]; Institute of Microtechnology Mainz GmbH (IMM), Germany [Ehrfeld and Lehr (1994), Weber et al (1996)]; Industrial Microelectronics Center AB (IMC), Sweden [Larsson (1996), Elderstig (1996)]. …”

Section: Introductionmentioning

confidence: 99%

Comparative study of hot embossed micro structures fabricated by laboratory and commercial environments

Lin

Cheng

Chiu

1998

Microsystem Technologies

View full text Add to dashboard Cite

Hot embossed microstructures fabricated by laboratory and commercial environments have been studied. The laboratory process uses silicon with micropyramid patterns as the mold insert. Fine replication by using Polymethyl Methacrylate (PMMA) has been achieved. The commercial process uses electroplated nickel as the mold insert. Polyvinyl Chloride (PVC), which has a lower glass transition point than PMMA, has been used as the raw material. Fabrication results show that the laboratory process, although taking about 2 hours long per run, can successfully replicate microstructures. The commercial process which takes only 1 minute per run may be fine tuned for good replication. Atomic Force Microscope (AFM) has been used to analyze the fabricated microstructures. It is found that the root mean square (r.m.s.) roughness of PMMA is about 4 nm and that of PVC is about 10-15 nm. Defects including voids and bumps on both PMMA and PVC films have been found.

show abstract

Polymeric MST - high precision at low cost

Cited by 8 publications

References 7 publications

Electro-discharge machining of mesoscopic parts with electroplated copper and hot-pressed silver tungsten electrodes

Electro-discharge machining of mesoscopic parts with electroplated copper and hot-pressed silver tungsten electrodes

Polymer Mems System for Measuring the Mechanical Modulus of a Biological Cell

Comparative study of hot embossed micro structures fabricated by laboratory and commercial environments

Contact Info

Product

Resources

About