Pure
and 3–12 at. % Pr-doped In2O3 macroporous
spheres were fabricated by ultrasonic spray pyrolysis and their acetone-sensing
characteristics under dry and humid conditions were investigated to
design humidity-independent gas sensors. The 12 at. % Pr-doped In2O3 sensor exhibited approximately the same acetone
responses and sensor resistances at 450 °C regardless of the
humidity variation, whereas the pure In2O3 exhibited
significant deterioration in gas-sensing characteristics upon the
change in the atmosphere, from dry to humid (relative humidity: 80%).
Moreover, the 12 at. % Pr-doped In2O3 sensor
exhibited a high response to acetone with negligible cross responses
to interfering gases (NH3, CO, benzene, toluene, NO2, and H2) under the highly humid atmosphere. The
mechanism for the humidity-immune gas-sensing characteristics was
investigated by X-ray photoelectron and diffuse reflectance infrared
Fourier transform spectroscopies together with the phenomenological
gas-sensing results and discussed in relation with Pr3+/Pr4+ redox pairs, regenerative oxygen adsorption, and
scavenging of hydroxyl groups.