Polysilicon cantilever beam using surface micromachining technology for application in microswitches

Lucas, S.; Kis-Sion, K.; Pinel, Jacques; Bonnaud, Olivier

doi:10.1088/0960-1317/7/3/021

Cited by 9 publications

(6 citation statements)

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“…Compared to a simple cantilever with a single clamped edge, the current design has more benefits for avoiding a stiction problem by the capillary force during the wet etching process and upward bending problem when we deposit a metal on the cantilever. 25 Furthermore, the device is more robust for the PDMS (polydimethylsiloxane) stamping process for transferring the WSe 2 monolayer. To fabricate the device, we first defined nanopyramid arrays on a silicon-on-insulator wafer using electron-beam lithography followed by metal lift-off process for Cr mask.…”

mentioning

confidence: 77%

“…The actuator consists of two cantilevers connected with a thin tether. Compared to a simple cantilever with a single clamped edge, the current design has more benefits for avoiding a stiction problem by the capillary force during the wet etching process and upward bending problem when we deposit a metal on the cantilever . Furthermore, the device is more robust for the PDMS (polydimethylsiloxane) stamping process for transferring the WSe 2 monolayer.…”

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confidence: 87%

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Position and Frequency Control of Strain-Induced Quantum Emitters in WSe₂ Monolayers

et al. 2019

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Future scalable and integrated quantum photonic systems require deterministic generation and control of multiple quantum emitters. Although various approaches for spatial and spectral control of the quantum emitters have been developed, on-chip control of both position and frequency is still a long-standing goal in solid-state quantum emitters. Here, we demonstrate simultaneous control of position and frequency of the quantum emitters from transition metal dichalcogenide monolayers. Atomically thin two-dimensional materials are inherently sensitive to external strain and offer a new opportunity of creating and controlling the quantum emitters by engineering strain. We fabricate an electrostatically actuated microcantilever with nanopyramid patterns, providing a local strain engineering platform for the WSe 2 monolayer. The integrated WSe 2 generates high-purity single photon emission at patterned positions with a tuning range up to 3.5 meV. Together with the position and frequency control, we investigate the strain response on the fine-structure splitting and confirm 11% reduction in the fine splitting at the estimated tensile strain of 0.07%.

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confidence: 77%

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confidence: 87%

Position and Frequency Control of Strain-Induced Quantum Emitters in WSe₂ Monolayers

et al. 2019

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“…Physical changes occurred in the devices due to external disturbances or environmental changes effects the mechanical behavior. Micro cantilever based devices found its application in gas, temperature, pressure and biological sensors (13) . Its reduced micro scale dimension will make them more sensitive, cost effective and faster.…”

Section: Micro Cantilever Beammentioning

confidence: 99%

Identification of multiple crack locations in micro cantilever beam by wavelet transforms

Ravikumar¹,

Priya²

2020

IJST

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Background/Objectives: Presence of cracks in micro cantilever beams badly influence the performance of the device. This study is to propose suitable method utilizing wavelet transform to detect the cracks present over the structure of micro cantilever beams. Methods: The proposed device structure was designed and modeled using COMSOL Multi-physics simulation software. The signals obtained are analyzed using wavelet transform. Findings: Micro cantilevers shows difference in its vibrational frequency, stress and deflection over various input conditions. The location of the multiple cracks which appears in micro cantilever structure due to various working conditions were perfectly identified using wavelet transform analysis. Novelty/Applications: We report the accurate locations of the crack present in micro structured devices. This ideal method can be applied on micro cantilever devices which found its applications as Transducers, Sensors, Switches, Actuators and Probes.

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“…1. Structure of cantilever beam well developed [16]. Since this devices were inevitable today for their exclusive properties.…”

Section: Micro-cantilever Beammentioning

confidence: 99%

Detection of cracks in Micro structured Cantilever Beam using Wavelet Transforms

K*,

Priya B

2020

IJRTE

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Wavelet Analysis, the improved version of Fourier transform is used to investigate and analyze the variant transient signals in time-frequency domain with higher accuracy and precision. Wavelet theory found its promising application in various fields not limited to Physics, Biology, Geophysics, Engineering and Medicine which becomes a common tool to analyze data. In this work we present new insight using wavelet transform to detect the cracks present in micro structured cantilever beam which found its application in various Micro Electro Mechanical System (MEMS) devices such as Transducers, Sensors, Switches, Actuators and Probes. Even a small change in microstructure will reflect in its dynamic output, so it is desired to locate the presence of cracks or damages over the device structure accurately. The modeling of such microstructure is designed and simulated using COMSOL Multiphysics. The displacement (Static Response) and stress of the beam for simulated damage were analyzed by wavelet transform using MATLAB. The obtained results highlights this method of analysis provides accurate location and effect of the crack over the Micro cantilever structure.

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Polysilicon cantilever beam using surface micromachining technology for application in microswitches

Cited by 9 publications

References 1 publication

Position and Frequency Control of Strain-Induced Quantum Emitters in WSe₂ Monolayers

Position and Frequency Control of Strain-Induced Quantum Emitters in WSe₂ Monolayers

Identification of multiple crack locations in micro cantilever beam by wavelet transforms

Detection of cracks in Micro structured Cantilever Beam using Wavelet Transforms

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Polysilicon cantilever beam using surface micromachining technology for application in microswitches

Cited by 9 publications

References 1 publication

Position and Frequency Control of Strain-Induced Quantum Emitters in WSe2 Monolayers

Position and Frequency Control of Strain-Induced Quantum Emitters in WSe2 Monolayers

Identification of multiple crack locations in micro cantilever beam by wavelet transforms

Detection of cracks in Micro structured Cantilever Beam using Wavelet Transforms

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Product

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Position and Frequency Control of Strain-Induced Quantum Emitters in WSe₂ Monolayers

Position and Frequency Control of Strain-Induced Quantum Emitters in WSe₂ Monolayers