Polysilicon comb micro-accelerometer system design and FEM simulation

Liu, Fengli; LianXing, Gao; Hao, Yongping; Zeng, Pengfei

doi:10.1117/12.717487

Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer 2006

DOI: 10.1117/12.717487

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Polysilicon comb micro-accelerometer system design and FEM simulation

Fengli Liu

Gao LianXing

Yongping Hao

et al.

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2008

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Characteristic analysis and simulation for polysilicon comb micro-accelerometer

Liu

Hao

2008

Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Ar

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Micro-accelerometer structure is one of common MEMS devices. Its performance and characteristic couldn't be detected in the package. Under the impact of static load shock, dynamic harmonic load shock and temperature variation, the response were investigated. When static load was applied on the top of the micro-accelerator, its displacement and contact force that applied on the bottom increased nonlinearly with the input load increased. While the dynamic harmonic load applied on micro-accelerator, the changes of the generalized acceleration, generalized displacement, generalized velocity, phase acceleration, phase displacement, phase velocity in six modes with different wave frequencies were gained in mode analyses. The impact of temperature on device performance was investigated and the ideal work environment temperature was obtained.

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Characteristic analysis and simulation for polysilicon comb micro-accelerometer

Liu

Hao

2008

Seventh International Symposium on Instrumentation and Control Technology: Sensors and Instruments, Computer Simulation, and Ar

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show abstract

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Polysilicon comb micro-accelerometer system design and FEM simulation

Cited by 1 publication

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Characteristic analysis and simulation for polysilicon comb micro-accelerometer

Characteristic analysis and simulation for polysilicon comb micro-accelerometer

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