Polysilicon piezoresistive MEMS pressure sensor: Study of analytical solutions for diaphragm and design &amp; simulation

Sujit, E. S.; Kusuma, NyomanDarmaJaya; Hemalatha, B.

doi:10.1109/iccsp.2017.8286660

Cited by 9 publications

(5 citation statements)

References 11 publications

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“…In brief, it comprises a 2-µm thick single-crystalline silicon device layer with a complete Wheatstone bridge configuration. This device layer is anodically bonded to a glass wafer containing cavities located beneath the pressure sensing membranes 46 . The sensor element has been seamlessly integrated into a probe, and the materials exposed to the environment comply with biocompatibility standards, such as USP Class VI and/or ISO-10993.…”

Section: Design Of the Sensor Element And Sensor Packagingmentioning

confidence: 99%

From wires to waves, a novel sensor system for in vivo pressure monitoring

Wright,

Züchner,

Annavini

et al. 2024

Sci Rep

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Pressure monitoring in various organs of the body is essential for appropriate diagnostic and therapeutic purposes. In almost all situations, monitoring is performed in a hospital setting. Technological advances not only promise to improve clinical pressure monitoring systems, but also engage toward the development of fully implantable systems in ambulatory patients. Such systems would not only provide longitudinal time monitoring to healthcare personnel, but also to the patient who could adjust their way-of-life in response to the measurements. In the past years, we have developed a new type of piezoresistive pressure sensor system. Different bench tests have demonstrated that it delivers precise and reliable pressure measurements in real-time. The potential of this system was confirmed by a continuous recording in a patient that lasted for almost a day. In the present study, we further characterized the functionality of this sensor system by conducting in vivo implantation experiments in nine female farm pigs. To get a step closer to a fully implantable system, we also adapted two different wireless communication solutions to the sensor system. The communication protocols are based on MICS (Medical Implant Communication System) and BLE (Bluetooth Low Energy) communication. As a proof-of-concept, implantation experiments in nine female pigs demonstrated the functionality of both systems, with a notable technical superiority of the BLE.

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Section: Design Of the Sensor Element And Sensor Packagingmentioning

confidence: 99%

From wires to waves, a novel sensor system for in vivo pressure monitoring

Wright,

Züchner,

Annavini

et al. 2024

Sci Rep

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show abstract

“…For piezoresistive sensors, the sensitive diaphragms above the vacuum cavities are pressured and then generate stress. The variation of piezoresistors caused by the applied pressure is transferred into voltage due to the piezoresistive effect [28,29]. Therefore, the performance of a piezoresistive sensor depends largely on the pressure sensitive diaphragm.…”

Section: Design and Fabrication Of The Micro Sensormentioning

confidence: 99%

Temperature Compensated Wide-Range Micro Pressure Sensor with Polyimide Anticorrosive Coating for Harsh Environment Applications

et al. 2021

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In this work, a MEMS piezoresistive micro pressure sensor (1.5 × 1.5 × 0.82 mm) is designed and fabricated with SOI-based micromachining technology and assembled using anodic bonding technology. In order to optimize the linearity and sensitivity over a wide effective pressure range (0–5 MPa) and temperature range (25–125 °C), the diaphragm thickness and the insulation of piezoresistors are precisely controlled by an optimized micromachining process. The consistency of the four piezoresistors is greatly improved by optimizing the structure of the ohmic contact pads. Furthermore, the probability of piezoresistive breakdown during anodic bonding is greatly reduced by conducting the top and bottom silicon of the SOI. At room temperature, the pressure sensor with 40 µm diaphragm demonstrates reliable linearity (0.48% F.S.) and sensitivity (33.04 mV/MPa) over a wide pressure range of 0–5.0 MPa. In addition, a polyimide protection layer is fabricated on the top surface of the sensor to prevent it from corrosion by a moist marine environment. To overcome the linearity drift due to temperature variation in practice, a digital temperature compensation system is developed for the pressure sensor, which shows a maximum error of 0.43% F.S. in a temperature range of 25–125 °C.

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“…The design is characterised by an annularly grooved membrane supported via a square central mass as shown in Fig1a and Fig 1b. Square diaphragm are easy and cost effective to fabricate for pressure sensors using anisotropic wet etchants as they have better sensitivity and produce relatively higher stress [20]. The substrate used for the sensor chip is N-type silicon wafer due to its unique mechanical properties [15].…”

Section: Structure Designmentioning

confidence: 99%

Design and Analysis of a Novel MEMS Piezoresistive Pressure Sensor with Annular Groove Membrane and Centre Mass for Low Pressure Measurements

Sahay

Hirwani

et al. 2021

Preprint

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Purpose: Micro Electronic Mechanical System (MEMS) based pressure sensors have found their use in multiple applications lately in the field of healthcare, automotive etc. These sensors however face a trade-off between sensitivity and linearity which limits sensor performance. The proposed design aims to achieve an enhanced sensor performance by alleviating the sensitivity and linearity trade-off.Methods: Novel structures such as annular grooves and center mass have been introduced for providing better sensor performance along with membrane dimension optimization. Annular grooves generate Stress Concentrated Regions (SCRs) on membrane surface on application of external pressure which enhances sensor sensitivity while center mass provides partial stiffening of the membrane and hence reduces non-linearity.Results: The proposed sensor achieves a low non-linearity error of 0.15% FSS with a well-balanced sensitivity of 28.0 mV/V/psi. Conclusion: The proposed novel sensor structure achieves a relatively better performance in comparison to conventional membrane variants. With a high sensitivity and appreciable linearity, the novel structure proves to be ideal for low pressure measurements in the range (0-5)KPa.

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Polysilicon piezoresistive MEMS pressure sensor: Study of analytical solutions for diaphragm and design & simulation

Cited by 9 publications

References 11 publications

From wires to waves, a novel sensor system for in vivo pressure monitoring

From wires to waves, a novel sensor system for in vivo pressure monitoring

Temperature Compensated Wide-Range Micro Pressure Sensor with Polyimide Anticorrosive Coating for Harsh Environment Applications

Design and Analysis of a Novel MEMS Piezoresistive Pressure Sensor with Annular Groove Membrane and Centre Mass for Low Pressure Measurements

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